High temperature resistant antireflective moth-eye structures for infrared radiation sensors

Glaser, Tilman; Ihring, Andreas; Morgenroth, Wolfgang; Seifert, N.; Schröter, Siegmund; Baier, V.

doi:10.1007/s00542-004-0412-5

Cited by 49 publications

(32 citation statements)

References 7 publications

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“…[1][2][3][4] In the AR structures, the pillars on the surface have to be configured in a tapered shape to vary the apparent refractive index of the surface gradually. [1][2][3][4] In the AR structures, the pillars on the surface have to be configured in a tapered shape to vary the apparent refractive index of the surface gradually.…”

Section: Introductionmentioning

confidence: 99%

Optimization of antireflection structures of polymer based on nanoimprinting using anodic porous alumina

Yanagishita

Kondo

Nishio

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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The optimization of antireflection (AR) structures of polymer composed of an ordered array of tapered pillars was studied. An anodic porous alumina mold with precisely controlled tapered holes was prepared and used for photoimprinting of the polymer. The reflectance of the obtained AR polymer structures with conical pillars was evaluated through the measurement of transmittance. Among the AR structures with pillars with various slopes, those with a gradually changing slope exhibited the lowest reflectance. The fabrication process will be effective for the formation of an AR surface with minimized reflectance over a large sample area.

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Section: Introductionmentioning

confidence: 99%

Optimization of antireflection structures of polymer based on nanoimprinting using anodic porous alumina

Yanagishita

Kondo

Nishio

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…Using IFL, moth eye structures can be written on different surface shapes as concave or freeform optical surfaces and even on top of diffraction gratings or on top of microlens arrays (see Figure 6, left). Additionally, these complex microstructures can be dry etched into many different materials, e.g., silicon [20], reducing the Fresnel loss of about 30% from each side of a silicon wafer for a high-temperature sensor application. These moth eye gratings are of fundamental importance, as they can be used in many optical devices as, e.g., with lenses needed for microscopy, photography, semiconductor illumination, and many others.…”

Section: Grating Types According To Applicationmentioning

confidence: 99%

High-end spectroscopic diffraction gratings: design and manufacturing

Glaser

2015

Advanced Optical Technologies

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Diffraction gratings are key components for spectroscopic systems. For high-end applications, they have to meet advanced requirements as, e.g., maximum efficiency, lowest possible scattered light level, high numerical aperture, and minimal aberrations. Diffraction gratings are demanded to allow spectrometer designs with highest resolution, a maximal étendue, and minimal stray light, built within a minimal volume. This tutorial is intended to provide an overview of different high-end spectroscopic gratings, their theoretical design and manufacturing technologies.

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“…While LWIR coatings are available, incorporating them into the above process flow could be challenging. An alternative is to use sub-wavelength antireflective structures [41] where the silicon is etched to create a series of isolated posts whose dimensions are well below the wavelength of the radiation of interest. A simple proof of principle is shown in Fig.…”

Section: Fabrication and Processingmentioning

confidence: 99%