2008
DOI: 10.1016/j.jcrysgro.2008.08.045
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Thermodynamical analysis of oxygen incorporation from a quartz crucible during solidification of multicrystalline silicon for solar cell

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Cited by 76 publications
(34 citation statements)
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“…The average amount of SiO g concentration in the gas phase is 10 -9 mol/cm 3 and the maximum concentration is about 10 -8 mol/cm 3 , which are almost the same as the simulation results of Smirnov and Kalaev [10] in a Czochralski furnace. The average amount of oxygen atom concentration in the melt is 10 17 atom/cm 3 , which is consistent with the experimental result reported by Matsuo et al [18]. The concentration of SiO is large in the top half of the furnace and small in the bottom half of the furnace.…”
Section: Distributions Of Carbon and Oxygensupporting
confidence: 91%
“…The average amount of SiO g concentration in the gas phase is 10 -9 mol/cm 3 and the maximum concentration is about 10 -8 mol/cm 3 , which are almost the same as the simulation results of Smirnov and Kalaev [10] in a Czochralski furnace. The average amount of oxygen atom concentration in the melt is 10 17 atom/cm 3 , which is consistent with the experimental result reported by Matsuo et al [18]. The concentration of SiO is large in the top half of the furnace and small in the bottom half of the furnace.…”
Section: Distributions Of Carbon and Oxygensupporting
confidence: 91%
“…Considering the chemical reaction that occurs at the interface between the quartz crucible and the silicon nitride (Si 3 N 4 ) coating (Si 3 N 4(s) + 3SiO 2(s) 26SiO (g) +2N 2(g) ) and that occurring at the interface between the Si 3 N 4 liner and the silicon melt (SiO (g) 2Si (l) +O (l) ), the equilibrium oxygen concentration C O on the Si 3 N 4 linear surface immersed in the silicon melt can be expressed in the following form [18]:…”
Section: Mathematical Modelmentioning
confidence: 99%
“…(a) On the quartz crucible wall, reaction (1) occurs and the equilibrium concentration of oxygen atoms is expressed as [10] c 0 ¼ 0:5 Â 10 23 Â a 1Àa atom=cm 3 ,…”
Section: Coupled Model Of Oxygen and Carbon Transportmentioning
confidence: 99%