1995
DOI: 10.1016/0925-9635(95)00312-6
|View full text |Cite
|
Sign up to set email alerts
|

Thermodynamic analysis of phase transformations at the dissociative evaporation of silicon carbide polytypes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

1
14
0

Year Published

2006
2006
2019
2019

Publication Types

Select...
7
2

Relationship

0
9

Authors

Journals

citations
Cited by 35 publications
(19 citation statements)
references
References 2 publications
1
14
0
Order By: Relevance
“…Hence, it is expected that improving the C transport conditions and increasing the effective C/Si ratio should decrease the contamination level of nitrogen and In a standard PVT growth process for SiC, the major vapor species in the growth ambient are Si, Si 2 C and SiC 2 [9]. The partial pressures of the two Si-rich species are much higher than for the latter specie [10]. As a result, the stoichiometry of the gas phase is strongly Si rich at the beginning of the growth, and continuously changes towards the C-rich direction because of the preferential loss of the more volatile Si species from the growth crucible.…”
Section: Introductionmentioning
confidence: 99%
“…Hence, it is expected that improving the C transport conditions and increasing the effective C/Si ratio should decrease the contamination level of nitrogen and In a standard PVT growth process for SiC, the major vapor species in the growth ambient are Si, Si 2 C and SiC 2 [9]. The partial pressures of the two Si-rich species are much higher than for the latter specie [10]. As a result, the stoichiometry of the gas phase is strongly Si rich at the beginning of the growth, and continuously changes towards the C-rich direction because of the preferential loss of the more volatile Si species from the growth crucible.…”
Section: Introductionmentioning
confidence: 99%
“…In this expression, m is the mass of a Si atom, log 10 P eq (Pa) = 12.74 − 2.66 × 10 4 /T( • K), [17] and β is the evaporation coefficient. [18] We note that increasing P shifts T G to higher temperature and no decomposition occurs if P > P eq .…”
mentioning
confidence: 99%
“…According to the thermodynamic data by Glushko [32], the equilibrium partial pressures of Si, SiC 2 and Si 2 C in the temperature range from 1800 K to 3103 K are functions of the temperature as follows [33] [34]) is the evaporation enthalpy per mole Fe. Fig.…”
Section: Fabrication Mechanismmentioning
confidence: 99%