Thermochemical writing with high spatial resolution on Ti films utilising picosecond laser

Veiko, Vadim P.; Zakoldaev, R. A.; Shakhno, E. A.; Sinev, D. A.; Nguyen, Zung K.; Баранов, А. В.; Bogdanov, K. V.; Gedvilas, Mindaugas; Račiukaitis, Gediminas; Vishnevskaya, Lidiya V.; Degtyareva, Elena N.

doi:10.1364/ome.9.002729

Cited by 9 publications

(12 citation statements)

References 20 publications

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“…Single-pulse action with minimum pulse energy required for the recording (Ep = 54 μJ) was determined as a threshold value (Figure 4). The data obtained allowed us to estimate the range of laser fluence (ε0 = 4Ep/πD 2 ) for the oxidation regime 0.1-0.3 J/cm 2 , which is in the agreement with previously published results [34]. Here, we noticed a linear dependence of a single stripe width (w) versus pulse energy.…”

Section: Resultssupporting

confidence: 90%

“…Significant effect on the contrast image formation and on the optimal number of pulses is exerted by the laser fluence (ε 0 ): as the simulation results show, varying the fluence within the permissible range of operating values (shown in Figure 3) allows us to reduce the number of pulses required for contrast recording by more than two orders of magnitude (Figure 9), which correlates with experimental results [34]. Modeling was carried out for the regimes ensuring the temperature of the film below the melting threshold (for example, ε 0 ≤ 0.2 J/cm 2 for a 60 nm thick Ti film) providing high recording accuracy, although oxidation is possible in the liquid phase as well.…”

Section: Laser Fluencesupporting

confidence: 73%

“…The estimated ranges of laser fluence for different film thicknesses and different materials (Ti, Zr, Hf, V, Nb, Ta) are shown in Figure 3. The red dot at the Ti diagram shows the area of thermochemical recording experimentally defined in [29,34]. These graphs give us a general view of the ranges of laser fluence necessary to choose the appropriate values when conducting experiments on different metal films.…”

Section: Simulation Resultsmentioning

confidence: 99%

“…To determine the thickness of the oxide layer H and its distribution over the film surface, we solved Equation (1) using the "equivalent time" method proposed earlier by Libenson, M.N. [35], which had numerous applications in our and other authors' works (for example, [24,[28][29][30][31][32][33][34]) for calculation of the dynamics of oxidation, taking into account the temperature distribution in the film at the heating T heat and cooling T cool stages for each pulse [34]:…”

Section: Setting the Simulation Problemmentioning

confidence: 99%

“…Estimations also show that Ti films have the most explicit optimal recording region (meaning recording the narrowest high-contrast elements), but V and Ta films could also provide a high contrast value due to the high initial absorption (see Figure 8). To ensure the single-stage laser thermochemical recording, we should use the films of metals that form transparent oxide layers during non-stationary heating: for example, Ti with TiO2 [29,34], Zr with ZrO2 [40], Nb with Nb2O5 [41,42], Ta with Ta2O5 [43,44], V with V2O5 [45], and Hf with HfO2 [46,47]. Figure 12 shows the calculated values of the FWHM and the contrast of the thermochemical image elements depending on the number of pulses for the films of the abovementioned metals.…”

Section: Film Materialsmentioning

confidence: 99%

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Laser Thermochemical High-Contrast Recording on Thin Metal Films

et al. 2020

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Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters.

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Section: Resultssupporting

confidence: 90%

Section: Laser Fluencesupporting

confidence: 73%

Section: Simulation Resultsmentioning

confidence: 99%