Thermo-mechanical characterization of micromachined GaAs-based thermal converter using contactless optical methods

Lalinský, T.; Držík, Milan; Chlpík, Juraj; Krnac, M.; Hašc̆ı́k, Š.; Mozolová, Ž.; Kostič, I.

doi:10.1016/j.sna.2005.04.027

Cited by 12 publications

(4 citation statements)

References 15 publications

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“…With the development of micromechanics and micro-optoelectro-mechanical systems (MOEMS), the requirements of microactuating technology and microactuators have been increased. Most of the previous microactuators utilize conventional driving principles such as magnetic [1], electrostatic [2], piezoelectric [3,4], magnetostrictive [5], and thermal actuation [6,7], among which, thermal actuation includes electrothermal actuation [8][9][10] and optothermal actuation [11,12]. In an electrothermal actuator, thermal deformation occurs when electric current flows through two expansion arms of differing resistance [13,14], so that electrothermal actuation is achieved.…”

Section: Introductionmentioning

confidence: 99%

Theoretical model of an optothermal microactuator directly driven by laser beams

Xu¹,

Zhang²,

Xu³

et al. 2015

J. Micromech. Microeng.

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This paper proposes a novel method of optothermal microactuation based on single and dual laser beams (spots). The theoretical model of the optothermal temperature distribution of an expansion arm is established and simulated, indicating that the maximum temperature of the arm irradiated by dual laser spots, at the same laser power level, is much lower than that irradiated by one single spot, and thus the risk of burning out and damaging the optothermal microactuator (OTMA) can be effectively avoided. To verify the presented method, a 750 μm long OTMA with a 100 μm wide expansion arm is designed and microfabricated, and single/dual laser beams with a wavelength of 650 nm are adopted to carry out experiments. The experimental results showed that the optothermal deflection of the OTMA under the irradiation of dual laser spots is larger than that under the irradiation of a single spot with the same power, which is in accordance with theoretical prediction. This method of optothermal microactuation may expand the practical applications of microactuators, which serve as critical units in micromechanical devices and micro-opto-electro-mechanical systems (MOEMS).

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Section: Introductionmentioning

confidence: 99%

Theoretical model of an optothermal microactuator directly driven by laser beams

Xu¹,

Zhang²,

Xu³

et al. 2015

J. Micromech. Microeng.

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show abstract

“…The most critical parts of all the above actuators may be very small; however, as large energy is required, they usually have to use external electrical power supply sources connected to the microsystems through wires, which will result in device packaging difficulties, weak mobility, electrical interference, or an enlarged device size. Therefore, several researchers adopted laser as the direct power to heat the actuator (Chen et al, 1998;Lalinský et al, 2005;Pichonat et al, 2004;Poosanaas et al, 2000;Savran et al, 2002). They all have obtained various degrees of success, but due to their complex manufacture they are hard to be applied practically.…”

Section: Introductionmentioning

confidence: 99%

Microscopic observation and laser‐controlled microoptothermal drive mechanism

Zhang

Liu

et al. 2007

Microscopy Res & Technique

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The mechanism of novel optothermal microactuators (OTA) was analyzed with a microscope system, a charge-coupled device-combined light microscope, and a computer system. One OTA, two optothermal microswitches (OTS) with different length and shape were machined by an excimer laser micromatching system using single layer material. They all had two thin expansion arms with different widths. The mechanism of the OTA/OTS is that the different optothermal expansion controlled by asymmetric topology and shape of the arms causes a magnified lateral deflection or vibration. A red laser diode (650 nm) with maximum power output of 30 mW was employed as the external power source to drive the OTA/OTS. Experiments were carried out with the microscope system, and serial images and videos were acquired. The results indicate that the structure of the OTA/OTS is simple and easy to be manufactured. They can practically generate an obvious lateral deflection or vibration. When the location of the laser spot on the OTA changed, the direction of its deflection is also changed. When the value of laser power that irradiated on the OTS increased, the lateral deflection of the OTS enlarged, the maximum could be larger than 30 microm. This kind of novel microactuator has the advantages of remote wireless controlling, large displacement, simple structure, easy to be machined, and therefore will be quite useful for the practical applications in the fields of micro/nanotechnology.

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“…Recently, a novel approach in design of MTC device has been introduced [53,54]. It is based on so called a suspended island structure.…”

Section: Micromachined Thermal Convertersmentioning

confidence: 99%

“…26. An electro-thermal [53] and thermo-mechanical [54] analysis of the MEMS device has been carried out. The both power to temperature (P-T) and power to voltage (P-V) conversion characteristics were determined.…”

Section: Micromachined Thermal Convertersmentioning

confidence: 99%

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

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Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

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Thermo-mechanical characterization of micromachined GaAs-based thermal converter using contactless optical methods

Cited by 12 publications

References 15 publications

Theoretical model of an optothermal microactuator directly driven by laser beams

Theoretical model of an optothermal microactuator directly driven by laser beams

Microscopic observation and laser‐controlled microoptothermal drive mechanism

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

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