Thermo-chemical microstructuring of thin metal films using multi-beam interference by short (nano- &amp; picosecond) laser pulses

Gedvilas, Mindaugas; Voisiat, Bogdan; Indrišiūnas, Simonas; Račiukaitis, Gediminas; Veiko, Vadim P.; Zakoldaev, R. A.; Sinev, D. A.; Shakhno, E. A.

doi:10.1016/j.tsf.2017.05.010

Cited by 17 publications

(15 citation statements)

References 26 publications

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“…The estimated ranges of laser fluence for different film thicknesses and different materials (Ti, Zr, Hf, V, Nb, Ta) are shown in Figure 3. The red dot at the Ti diagram shows the area of thermochemical recording experimentally defined in [29,34]. These graphs give us a general view of the ranges of laser fluence necessary to choose the appropriate values when conducting experiments on different metal films.…”

Section: Simulation Resultsmentioning

confidence: 99%

“…To determine the thickness of the oxide layer H and its distribution over the film surface, we solved Equation (1) using the "equivalent time" method proposed earlier by Libenson, M.N. [35], which had numerous applications in our and other authors' works (for example, [24,[28][29][30][31][32][33][34]) for calculation of the dynamics of oxidation, taking into account the temperature distribution in the film at the heating T heat and cooling T cool stages for each pulse [34]:…”

Section: Setting the Simulation Problemmentioning

confidence: 99%

“…Estimations also show that Ti films have the most explicit optimal recording region (meaning recording the narrowest high-contrast elements), but V and Ta films could also provide a high contrast value due to the high initial absorption (see Figure 8). To ensure the single-stage laser thermochemical recording, we should use the films of metals that form transparent oxide layers during non-stationary heating: for example, Ti with TiO2 [29,34], Zr with ZrO2 [40], Nb with Nb2O5 [41,42], Ta with Ta2O5 [43,44], V with V2O5 [45], and Hf with HfO2 [46,47]. Figure 12 shows the calculated values of the FWHM and the contrast of the thermochemical image elements depending on the number of pulses for the films of the abovementioned metals.…”

Section: Film Materialsmentioning

confidence: 99%

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Laser Thermochemical High-Contrast Recording on Thin Metal Films

et al. 2020

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Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters.

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Section: Simulation Resultsmentioning

confidence: 99%

Section: Setting the Simulation Problemmentioning

confidence: 99%

Section: Film Materialsmentioning

confidence: 99%

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Laser Thermochemical High-Contrast Recording on Thin Metal Films

et al. 2020

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“…To create a stable, double-beam interference pattern in the focal plane, a laser beam was split by a phase grating, and two identical beams of the first interference order were subtracted by a spatial filter. Next, the beams were focused by the second lens creating an interference pattern at the intersection [27,28]. In the case of a confocal scheme, the angle between two beams is changed to manage the period of the pattern, which is determined as [29]:…”

Section: Laser Treatmentmentioning

confidence: 99%

Picosecond laser writing of Ag−SiO2 nanocomposite nanogratings for optical filtering

Andreeva

Koval

Sergeev

et al. 2020

Optics and Lasers in Engineering

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In this article, we propose a novel approach for fabricating of dielectric nanogratings via direct laser writing. Possibilities of a well-controlled ultrashort laser recording of Ag-SiO 2 nanocomposite gratings and their optical properties are examined. The mechanisms of laser processing involve silver nanoparticle growth in nanoporous silica glass films and laser interferencebased formation of a periodic grating-like nanorelief. It is shown that laser energy should stay below a surface "grooves" formation threshold for laserinscription of the interference-based grating. Otherwise, another periodic structure oriented parallel to the incident laser polarization appears to erase the interference pattern. The parameter windows required for a controlled fabrication of the obtained structures are determined. The required thresholds decay with the number of applied laser pulses is explained by a similarity in the roles of the absorbing nanoparticles and surface defect accumulation typically leading to such dependencies. The optical properties of the obtained gratings are shown to depend on the angle between the incidence plane and the grating direction. When these directions coincide, a signal enhancement with a period-dependent blue-shift is revealed in the diffuse scattering spectra. When these directions are perpendicular, the signal is less enhanced, and a red shift is observed. The observed results are promising in short laser fabrication of different optical components, such as, reflective optical filters.

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“…As for grating structures, there is no need to fabricate them using point-by-point scanning, so it saves the processing time. Laser interference is an inexpensive method since it is mask-free, thus the multi-beam laser interference ablation and interference lithography are used to prepare periodic structures, and some other steps are used if necessary, such as chemical etching [ 30 , 31 , 32 ]. For processing hard materials, high laser energy is necessary to realize materials’ removal.…”

Section: Introductionmentioning

confidence: 99%

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

et al. 2020

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Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality.

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Thermo-chemical microstructuring of thin metal films using multi-beam interference by short (nano- & picosecond) laser pulses

Cited by 17 publications

References 26 publications

Laser Thermochemical High-Contrast Recording on Thin Metal Films

Laser Thermochemical High-Contrast Recording on Thin Metal Films

Picosecond laser writing of Ag−SiO2 nanocomposite nanogratings for optical filtering

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

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