“…There are many fingerprints for gases, liquids, and biomolecules in the MIR wavelength [ 150 , 151 , 152 , 153 , 154 , 155 , 156 , 157 , 158 , 159 ]. Correspondingly, the working wavelengths of many sensors are designed in the range of MIR [ 160 , 161 , 162 , 163 , 164 , 165 , 166 , 167 , 168 , 169 , 170 ]. In addition to microelectronics, Si is also one of the most popular materials in photonics [ 171 , 172 ].…”