Sintering, coalescence, and compositional changes of hydrogen-terminated, crystalline silicon nanoparticles were examined as a function of temperature. Monodisperse aerosol particles ∼5 nm in diameter were synthesized by gas-to-particle conversion in a plasma reactor and then immediately heated as they flowed through a tube furnace. Particles were also collected as powders and then heated in other apparatuses. Structure and size changes were characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM), thermal behavior was characterized by differential scanning calorimetry (DSC), and silicon-hydrogen functionality changes were characterized by Fourier transform infrared spectroscopy (FTIR). At ∼500 °C, only silicon monohydride functional groups are observed in FTIR spectra. XRD results obtained after heating to that temperature indicate a small reduction in crystal size relative to the freshly generated particles, and TEM images show disorganized particle shells surrounding crystalline particle cores. Between 550 and 750 °C extensive sintering occurs and polycrystalline aggregates evolve. At temperatures greater than ∼750 °C, no silicon hydrides are observed in FTIR spectra, and extensive coalescence occurs. Temperatures of 1000 °C are required to produce single-crystalline, spherical particles. Exothermic behavior is exhibited up to 1000 °C with two conspicuous exothermic transitions centered at ∼350 and 750 °C. The transitions correlate well with desorption of higher hydrides from particle surfaces and coalescence of particle agglomerates, respectively.