Silicon quantum dots
are attractive materials for luminescent devices
and bioimaging applications. For these light-emitting applications,
higher photoluminescence efficiency is desired in order to achieve
better device performance. Nonthermal plasma synthesis successfully
allows for the continuous production of silicon nanocrystals, but
postprocessing is necessary to improve photoluminescence quantum yields
so that nanocrystals can be used for luminescence applications. In
this work, we demonstrate an all-aerosol-phase synthesis and processing
route that integrates nonthermal plasma synthesis, plasma-assisted
surface functionalization with alkene ligands, and in-flight annealing
within one flow stream. Here, luminescent silicon nanocrystals are
synthesized and postprocessed on a time scale of only 100 ms, which
is orders of magnitude faster than previous synthesis and functionalization
schemes. The as-produced silicon nanocrystals have photoluminescence
quantum yields exceeding 20%, which is a 5-fold increase compared
to previous silicon nanocrystals synthesized with all-aerosol-phase
approaches. We attribute the enhanced photoluminescence to the reduced
“dark” nanocrystal fraction due to reduction of dangling
bond density and desorption of surface silyl species induced by the
in-flight annealing. We also demonstrate that the ligand coverage
plays a minor role for the photoluminescence properties, but that
the nature of the silicon hydride surface groups is a major factor.