Thermally actuated optical microscanner with large angle and low consumption

Schweizer, Sandra; Calmes, S.; Laudon, M.; Renaud, Philippe

doi:10.1016/s0924-4247(99)00012-6

Cited by 86 publications

(38 citation statements)

References 13 publications

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“…Schwizer [9] reports a monolithic silicon integrated optical micro-scanner. The device consists of a mirror located on the tip of a thermal bimorph actuator beam and it is able to achieve large scan angles.…”

Section: Out-of-plane Motion Devicesmentioning

confidence: 99%

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

Tulenko¹,

Crane²

2007

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The objective for the FY06/07 fiscal year is the development of nano-scale radioisotope powered battery models and supporting radiation testing of components. Task & AccomplishmentsThis task focuses on the concepts of conversion technologies for radioisotope battery designs and the further investigation of radiation resilience levels of candidate materials identified during FY06 and FY07 for fluorescence or 'direct' generation of free current electrons in transducers. Physical testing of key energy conversion parameters were initiated and carried out in order to augment MCNP and the EGS transport code programs and provide the realistic insights to improvements in design of nano-scale radioisotope battery design. In FY07 such advances in design are being computationally pretested via MCNP and EGS and with semi-analytical formulations (when appropriate).The UF development and design team continues the development of a nano-scale radioisotope battery designs and design schemes that have the potential to provide sufficient power for MEMS devices under development in cutting edge laboratories in the US. Studies of fundamental mechanisms and simulation studies of stacked tandem cells optimized for indirect conversion have led to the design concept of using super-1 kilo-eV induced fluorescence of dielectric layers with transparent photovoltaic conversion devices. For all of our materials, fluorescence and phosphorescence overlap in their function. While many standard phosphors typically provide higher conversion ratios, radiation damage from most radioisotopes quickly degrade this initial advantage for power conversion.

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Section: Out-of-plane Motion Devicesmentioning

confidence: 99%

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

Tulenko¹,

Crane²

2007

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“…Nonetheless, for achieving high displacement amplitudes under relatively high vibration frequencies, cantilever design can be argued as an overall optimal option to explore. It has been used in conjunction with thermal actuation effectively for various applications in the past [4,9,10] and has obvious advantages in terms of simplicity in design and manufacturing. Micro-cantilevers can be excited to vibrate using several techniques such as using the bi-morph effect [5,11], base excitation [12], electrostatic [13,14] or electromagnetic [15] body forces.…”

Section: Introductionmentioning

confidence: 99%

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Komeili¹,

Menon²

2016

Int. j. simul. model.

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Dynamic behaviour of a micro-cantilever beam under periodic electro-thermal loading is studied in this paper. For certain applications the beam is required to vibrate at a particular frequency. Modal analysis using 3D finite element is used in order to find the geometrical parameters that makes fundamental frequency of the beam match the required frequency. Then non-linear dynamic thermoelastic analysis is conducted on the system to analyse the time-history (transient) behaviour of the beam and record its tip displacement. However, due to uncertainties and non-repeatabilities that are inherent properties of the system along with those associated with the manufacturing, final product is likely to have deviations from these estimated values (fundamental frequency and tip displacement). Thus, choosing a nominal (desired) design and studying the deviation in natural frequency and tip displacement via 2 k factorial Design-of-Experiments (DOE), effect of uncertainties on the overall performance of the system is investigated. This allows finding the significance of individual parameters on the overall robustness of the design as well as potential interactions between various parameters. Finally, the expected behaviour of the micro-cantilever and its robustness to design and implementation uncertainties are elaborated and statements for robust design of this system are made.

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“…With micro-electro-mechanical-system (MEMS) processes, various kinds of micro optical scanners have been fabricated employing different forms of driving mechanisms, including electrostatic (Toshiyoshi and Fujita 1996;Schenk et al 2001), electromagnetic (Fujita et al 2005;Yalcinkaya et al 2006), electrothermal (Schweizer et al 1999;Jain et al 2004), and piezoelectric (Kobayashi et al 2005;Filhol et al 2005;Bansevicius et al 2007;Koh et al 2011a) types. They not only showed improvements to replace traditional rotating prism and galvanometric scanners, but also bring a further miniaturization to enable new applications, such as endoscopic confocal microscopes for medical imaging (Jain et al 2004) and small mobile projectors for handheld display (Schenk et al 2001;Ko et al 2006;Yalcinkaya et al 2006).…”

Section: Introductionmentioning

confidence: 99%

A New Two-Axis Optical Scanner Actuated by Piezoelectric Bimorphs

Pan

Liao

2012

International Journal of Optomechatronics

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A two-axis optical scanner was designed and fabricated from stainless-steel substrate and piezoelectric sheets. Metal substrate with four cantilevers was bonded with eight piezoelectric sheets forming four bimorphs to enable two-axis scanning of the mirror. With a 5 mm Â 5 mm square mirror, following scanning angles and frequencies were achieved at two orthogonal vibration modes: 35.2 at 861.5 Hz with a driving voltage of 100 V p-p and 10.9 at 2485 Hz with a driving voltage of 200 V p-p . The developed technique offers alternative to MEMS scanners providing scanning ability with large mirror size and scanning angles at middle frequency range.

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Thermally actuated optical microscanner with large angle and low consumption

Cited by 86 publications

References 13 publications

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

A New Two-Axis Optical Scanner Actuated by Piezoelectric Bimorphs

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