1999
DOI: 10.1016/s0022-3115(98)00484-x
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Thermal vaporization and deposition of gallium oxide in hydrogen

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Cited by 83 publications
(62 citation statements)
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“…Consequently, the gallium loss at the surface must be largely suppressed at high p O2 . The observation goes along with that for Ga 2 O 3 reported in [78] where the partial pressure of the volatile gallium suboxide Ga 2 O decreases with increasing p O2 .…”
Section: Gallium Losssupporting
confidence: 87%
“…Consequently, the gallium loss at the surface must be largely suppressed at high p O2 . The observation goes along with that for Ga 2 O 3 reported in [78] where the partial pressure of the volatile gallium suboxide Ga 2 O decreases with increasing p O2 .…”
Section: Gallium Losssupporting
confidence: 87%
“…Direct reaction of Ga and NH 3 can also result in GaN because Ga 2 O(g) can back-react with H 2 to form Ga [14,18]:…”
Section: Growth Reaction Chemistrymentioning
confidence: 99%
“…Therefore, H 2 can be assumed to present in our system. Ga 2 O 3 will be reduced to Ga 2 O through the following reactions [26]. The reaction of Ga 2 O with ammonia results in the formation of GaN crystal nuclei [27].…”
Section: Resultsmentioning
confidence: 99%