2017
DOI: 10.1088/1361-6528/aa76ae
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Thermal sublimation: a scalable and controllable thinning method for the fabrication of few-layer black phosphorus

Abstract: In this work, we reported uniform layer-by-layer sublimation of black phosphorus under heating below 600 K. The uniformity and crystallinity of BP samples after thermal thinning were confirmed by Raman spectra and 2D Raman imaging. A uniform and crystalline bilayer black phosphorus flake with an area of 180 µm 2 was prepared with this method. No micron scale defects were observed. The sublimation rate of BP was around 0.18 nm / min at 500 K and 1.5 nm / min at 550 K. Both room and high temperature Raman peak i… Show more

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Cited by 23 publications
(30 citation statements)
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“…As a demonstration, a BP field‐effect transistor channel has been shown to be selectively thinned from 17 to 10 nm (Figure c), resulting in a 50‐fold increase of current on/off ratio with minimal effect on carrier mobility . An extension of vertical thinning has been achieved through the use of plasma etching and thermal sublimation by laser irradiation or direct heating . As shown in Figure d, multilayer BP and MoS 2 flakes are thinned after Ar + treatment that is tunable by plasma power and duration.…”
Section: Control Of Surface and Interface Propertiesmentioning
confidence: 97%
“…As a demonstration, a BP field‐effect transistor channel has been shown to be selectively thinned from 17 to 10 nm (Figure c), resulting in a 50‐fold increase of current on/off ratio with minimal effect on carrier mobility . An extension of vertical thinning has been achieved through the use of plasma etching and thermal sublimation by laser irradiation or direct heating . As shown in Figure d, multilayer BP and MoS 2 flakes are thinned after Ar + treatment that is tunable by plasma power and duration.…”
Section: Control Of Surface and Interface Propertiesmentioning
confidence: 97%
“…An effective, convenient, and cheap synthesis technique is urgently needed to promote the applications of BP in MIR photodetection products. In this section, we give a sketchy introduction about the synthesis techniques of thin‐film BP, including micromechanical exfoliation, [ 28,32,105–109 ] liquid‐phase exfoliation, [ 110–134 ] electrochemical exfoliation, [ 135–138 ] alkali metal intercalation, [ 139 ] plasma etching, [ 140–144 ] thermal sublimation, [ 145,146 ] anodic oxidation, [ 147 ] chemical thinning method, [ 148 ] mechanochemical method, [ 149 ] red phosphorus (RP)‐to‐BP conversion, [ 150–153 ] pulsed laser deposition, [ 154,155 ] solvothermal method, [ 156,157 ] and lateral growth method. [ 158 ] All these methods can be categorized into “top‐down” and “bottom‐up” techniques.…”
Section: Synthesis Of Thin‐film Black Phosphorusmentioning
confidence: 99%
“…To exfoliate BP from bulk down to 2D or quasi‐2D flakes, external forces are applied to break up the vdW bonds between two adjacent layers through micromechanical exfoliation, [ 28,32,105–109 ] liquid‐phase exfoliation, [ 110–134 ] electrochemical exfoliation, [ 135–138 ] or alkali metal intercalation method. [ 139 ] The other approach is to remove phosphorus atoms layer by layer through physical or chemical etching, including plasma etching, [ 140–144 ] thermal sublimation, [ 145,146 ] anodic oxidation, [ 147 ] chemical thinning method, [ 148 ] and mechanochemical method. [ 149 ]…”
Section: Synthesis Of Thin‐film Black Phosphorusmentioning
confidence: 99%
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“…These vacancies grow with an elliptical shape, with their long axis aligned along the zigzag direction of the bP crystal, see Figure . Based on these results, a method for the thermal thinning of few‐layer bP flakes has been proposed and demonstrated …”
Section: 2d Bp Stability Optimization and Device Propertiesmentioning
confidence: 99%