Thermal stability of CrTaN hard coatings prepared using biased direct current sputter deposition

Chen, Yung-I; Lin, Kun-Yi; Chou, Chau-Chang

doi:10.1016/j.tsf.2012.11.047

Cited by 9 publications

(3 citation statements)

References 41 publications

(64 reference statements)

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“…The degradation of a material is one of the most important problems in the industrial domain. Several forms of damage to the material surface produced in an aggressive environment have exposed interesting catalytic properties of hard thin films [1]. Furthermore, to enhance surface properties, extend the service life, and improve the appearance of materials, thin films are frequently used, whether in electronics fields, optics, or in mechanics, the development of different deposition techniques and the control of operating parameters have made it possible to obtain coatings with good wear resistance, very high hardness, and good thermal and chemical stability.…”

Section: Introductionmentioning

confidence: 99%

“…Thin films are subject to new searches due to the great interest concerning lifetime prolongation in the industrial fields; coated tools offer a two-to fourfold greater lifespan than uncoated tools. In this review, we present a general overview on thin films and their applications, and then we cover the hard coatings and their categories, general information about transition metal nitrides, as well as literature reviews of binary and complex nitride systems [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

“…For example, transition metal-based thin films (Cr, Ti, Mo, Zr, Ta, etc.) deposited on steel substrates by various conventional techniques exhibit excellent behavior under severe conditions [1,2]. The knowledge of film growth procedure enables the deposition of thin films with desired structure that satisfy a required function.…”

Section: Introductionmentioning

confidence: 99%

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Magnetron Sputtering of Transition Metal Nitride Thin Films for Environmental Remediation

et al. 2022

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The current economic and ecological situation encourages the use of steel to push the technological limits and offer more cost-effective products. The enhancement of steel properties like wear, corrosion, and oxidation resistance is achieved by the addition of small amounts of chemical elements such as Cr, Ni, Si, N, etc. The steel surface can be protected by different treatments such as heating and coating, among others. For many decades, coatings have been an effective solution to protect materials using thin hard films. Several technologies for thin film deposition have been developed. However, some of them are restricted to certain fields because of their complex operating conditions. In addition, some deposition techniques cannot be applied to a large substrate surface type. The magnetron sputtering deposition process is a good option to overcome these challenges and can be used with different substrates of varying sizes with specific growth modes and for a wide range of applications. In this review article, we present the sputtering mechanism and film growth modes and focus on the mechanical and tribological behavior of nitride thin films deposited by the magnetron sputtering technique as a function of process conditions, particularly bias voltage and nitrogen percentage. The biomedical properties of transition metal nitride coatings are also presented.

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Section: Introductionmentioning

confidence: 99%