Thermal Contact Calibration Between a Thermocouple Probe and a Microhotplate

Thiéry, Laurent; Toullier, Sebastien; Teyssieux, Damien; Briand, D.

doi:10.1115/1.2943306

Cited by 24 publications

(20 citation statements)

References 19 publications

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“…To date, several methods have been developed to calibrate SThM probes following on from the Peltier module first used to calibrate thermocouple probes by Luo et al [11]. Although some of these approaches are relatively advanced, for example, the 4-terminal-resistor calibration device developed by Shi et al [13], the resistance heater embedded in a SiNx membrane [14], and the Johnson noise thermometer on a membrane [15] [16], they all suffer from poor temperature uniformity which impedes their further application.…”

Section: Introductionmentioning

confidence: 99%

Quantification of probe–sample interactions of a scanning thermal microscope using a nanofabricated calibration sample having programmable size

et al. 2016

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Abstract. We report a method for quantifying scanning thermal microscopy (SThM) probe-sample thermal interactions in-air using a novel temperature calibration device.This new device has been designed, fabricated and characterized using SThM to provide an accurate and spatially variable temperature distribution that can be used as a temperature reference due to its unique design. The device was characterized by means of a microfabricated SThM probe operating in passive mode. This data was interpreted using a heat transfer model, built to describe the thermal interactions during a SThM thermal scan. This permitted the thermal contact resistance between the SThM tip and the device to be determined as 8.33 × 10 5 K/W. It also permitted the probe-sample contact radius to be clarified as being the same size as the probe's tip radius of curvature.Finally, the data was used in the construction of a lumped-system steady state model for the SThM probe and its potential applications were addressed.2

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Section: Introductionmentioning

confidence: 99%

Quantification of probe–sample interactions of a scanning thermal microscope using a nanofabricated calibration sample having programmable size

et al. 2016

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“…Figure 3 presents a scan result on the 1st design (temperature and topography maps) at 11 mW power supply and the temperature at the center of the device versus power. Due to imperfect contact and heat sink effect, a contact probe only provides its own temperature which is different from the actual surface temperature [3]. The second design includes a central RTD sensor (four points measurements) in order to quantify this difference, leading to a possible correction as shown in the right plot of Figure 3.…”

Section: Resultsmentioning

confidence: 99%

“…In passive mode, active calibration samples are needed to generate a local controlled hot area on which a probe can land. Previous measurements were performed in the past [3] using not adapted hotplates. Recently, a calibration chip design was reported at Eurosensors 2015 conference [4].…”

Section: Introductionmentioning

confidence: 99%

Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

Briand

Nguyen

Lemaire

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:We report on a micro-hotplate technology platform optimized for the calibration of Scanning Thermal Microscopy probes (SThM) used in surface temperature measurement mode. The three chips designed include the same heating area with a calibration area of 10 × 10 µm 2 where the SThM probes can land. The 1st design allows to study the influence of the nature of the material on the SThM probes thermal contact resistance. The 2nd design includes a resistive temperature sensor (RTD) integrated on the contact area, which is dedicated to evaluate the capability of a probe to measure a surface temperature. The 3rd design has a contact area made of a suspended platinum membrane for coupling SThM probes with optical thermal measurements. The thermal response of a thermocouple (TC) SThM probe was extracted demonstrating the relevance of these chips for SThM probes characterization and calibration.

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“…Thermocouple wires interact with environment and transfer heat to (or from) the surface and alert the measured temperature [25]. Therefore, the probe measures the disturbed temperature not the actual surface temperature.…”

Section: Stepped Fin Analysismentioning

confidence: 99%

“…Figure 8can be redrawn as electrical resistance as shown in Figure 9. If we assume * I , is very small therefore and can be neglected [25]:…”

Section: Electrical Resistance Analogymentioning

confidence: 99%

Effects of thermocouple electrical insulation on the measurement of surface temperature

Al-Waaly

Paul

Dobson

2015

Applied Thermal Engineering

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there is no specific value for the critical radius and the rate of heat flux around the thermocouple wire continuously increases with the wire diameter even when this is larger than the critical radius. Numerical simulation using COMSOL Multiphysics software also confirms that there is negligible thermal effect from the electrical insulation. Moreover, the experimental results agree well with those obtained by both the analytical and numerical methods and further confirm that the diameter of the thermocouple has an impact on the temperature measurement.

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Thermal Contact Calibration Between a Thermocouple Probe and a Microhotplate

Cited by 24 publications

References 19 publications

Quantification of probe–sample interactions of a scanning thermal microscope using a nanofabricated calibration sample having programmable size

Quantification of probe–sample interactions of a scanning thermal microscope using a nanofabricated calibration sample having programmable size

Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

Effects of thermocouple electrical insulation on the measurement of surface temperature

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