Thermal and mechanical limitations to processing resolution in volume non-diffractive ultrafast laser structuring

Zhang, Guodong; Stoian, Razvan; Lou, Rui; Chen, Tianqu; Li, Guangying; Wang, Xu; Pan, Yan; Wu, Pengfei; Wang, Jiang; Cheng, Guanghua

doi:10.1016/j.apsusc.2021.151170

Cited by 8 publications

(4 citation statements)

References 33 publications

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“…One reason for this phenomenon is that the peak intensity of the 6 ps pulse is lower than the 4 ps pulse at the same pulse energy (19 μJ). Since at 1030 nm the maximum peak intensity is achieved at the pulse duration of 1.5 ps around [38].…”

Section: Resultsmentioning

confidence: 97%

Nano-spheroid formation on YAG surfaces induced by single ultrafast Bessel laser pulses

Chen

Zhang

et al. 2022

Applied Surface Science

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Section: Resultsmentioning

confidence: 97%

Nano-spheroid formation on YAG surfaces induced by single ultrafast Bessel laser pulses

Chen

Zhang

et al. 2022

Applied Surface Science

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“…The observed feature scales are related to practical limitations, for example, the strength of confinement of the evanescent field in the presence of dephasing electronic excitation or the quenching time freezing the material evolution. Besides single feature dimensions, in many cases, the process resolution and the close-packing of the structures on the same scale relate to intrinsic artifacts associated to thermomechanics in the form of mechanically affected regions around the features of interest (Zhang et al, 2021). Part of energy diffuses away from the interaction region as pressure or heat fronts and creates material constraints that pose limitation to generating new structures in the affected regions.…”

Section: Rearranging Matter Under Lightmentioning

confidence: 99%

Ultrafast laser volume nanostructuring; a limitless perspective

Stoian

2023

Adv. Opt. Technol

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Ultrafast lasers are now unanimously recognized as processing tools capable of providing utmost precision. This becomes key in the context of material processing as precise feature scales can render a range of new characteristics to the processed materials. These features redesign their properties optically, mechanically, electrically, or from a chemical point of view. Precision is often accompanied by an increase in resolution. The advances in optical beam engineering and irradiation strategies, alongside with controlled material responses, have put in sight the opportunity to reach record small feature sizes, below 100 nm. Is there an intrinsic limit to optical fabrication? What are the new opportunities provided by laser processing on these scales? How one can make light adapt to matter and at the same time control the matter’s response under light on the smallest scales? In this article I intend to provide a brief overview into the latest developments in ultrafast laser volume nanostructuring, fundamentals and applications alike, stressing out the prospective roadmap and the new potential emerging from super-resolved ultrafast smart laser processing technologies.

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“…If the surrounding area presents intrinsic structural defects or if the stress around the energy deposition volume caused by thermal expansion exceeds the fracturing threshold (a positive Poisson coefficient could create for example shear stress with material yielding) [73], cracking occurs, limiting the minimal distance between structural voxels without generating catastrophic fracture connecting the voids. Accurate pulse energy, duration and positioning are required to reduce the affected region to a minimum size and increase the packaging density [72]. Possible control strategies to limit the affected regions are summarized in Fig.…”

Section: Genesis Of Single Nanovoidsmentioning

confidence: 99%

“…(d) Counterpropagating beam interference along the Bessel trace and the formation of nanovoid arrays.Reprinted with permission from[70] ©Wiley. (e) Reconstruction of the void and of the affected regions around the voxel with possible cracking under stress[71,72]. Inset: 2D Compressive stress simulations around a a laser-induced heat source.…”

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confidence: 99%

Ultrafast Laser Volume Nanostructuring of Transparent Materials: From Nanophotonics to Nanomechanics

Stoian

D’Amico²,

Bellouard³

et al. 2023

Springer Series in Optical Sciences

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The capability of ultrashort laser pulses to generate nonlinear absorption in the transparency window of dielectric materials is at the base of volume structuring. The result is a local change of the refractive index, the building block for generating complex embedded optical functions in three-dimensional geometries within a monolith chip. The nonlinearity determines spatial scales on the order of the wavelength. Depending on the rate and the amount of energy deposition, the local refractive index change can be accurately tuned from positive to negative values on variable scales, generating thus new capabilities for processing light within an optical chip in terms of embedded waveguides and micro-optics. New irradiation strategies and engineered glasses permit to go even further in reaching processing super-resolution, i.e. on spatial scales smaller than the optical resolution. The smallest scales achievable nowadays go well bellow the diffraction limit approaching and even surpassing the 100 nm value, a tenth of the wavelength. We will discuss in this chapter the possibility of obtaining structural features much smaller than the electromagnetic wavelength and the associated methods. Direct focusing and self-organization phenomena will be analyzed, as well as the optical functions originating from these processes, namely in transporting and manipulating light. Achieving extreme scales in the range of 100 nm generates an additional capability Razvan Stoian

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Thermal and mechanical limitations to processing resolution in volume non-diffractive ultrafast laser structuring

Cited by 8 publications

References 33 publications

Nano-spheroid formation on YAG surfaces induced by single ultrafast Bessel laser pulses

Nano-spheroid formation on YAG surfaces induced by single ultrafast Bessel laser pulses

Ultrafast laser volume nanostructuring; a limitless perspective

Ultrafast Laser Volume Nanostructuring of Transparent Materials: From Nanophotonics to Nanomechanics

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