1994
DOI: 10.1063/1.111407
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Thermal and ambient-induced deflections of scanning force microscope cantilevers

Abstract: The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts … Show more

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Cited by 406 publications
(243 citation statements)
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“…These changes in surface stress are in general not the same on the bottom and the top side. Any difference in surface stress Ds will lead to a bending of the cantilever [40,41]. For a rectangular cantilever this leads to Practically, these changes in surface stress lead to an unpredictable drift of the cantilever deflection which disturbs force measurements.…”
Section: General Designmentioning
confidence: 99%
“…These changes in surface stress are in general not the same on the bottom and the top side. Any difference in surface stress Ds will lead to a bending of the cantilever [40,41]. For a rectangular cantilever this leads to Practically, these changes in surface stress lead to an unpredictable drift of the cantilever deflection which disturbs force measurements.…”
Section: General Designmentioning
confidence: 99%
“…Early work presented the silicon cantilevers for temperature sensing [4]. Further advances in nanomechanics allowed the use of microcantilevers for the detection of biomarkers and the transduction of DNA hybridisation into a nanomechanical response [9][10][11], along with the use of silicon cantilevers for the detection of volatile organic compounds [5].…”
Section: Introductionmentioning
confidence: 99%
“…Subsequent binding of target molecules to one side of the cantilever causes a static cantilever deflection that be correlated to a specific surface binding reaction or molecular reorganisation process. So far, microcantilever based sensors have been successfully used to monitor a variety of different physical [3,4], chemical [5,6] and biological interactions [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…The specific reaction or combination between the analyte and the sensing layer can cause surface stress on the cantilever that gives rise to a bending of the cantilever [1,4,15,16]. For a resonant cantilever, however, the sensing area would be better to be localized near the free end to enhance the mass loading signal and to depress cross-talk signal from springconstant change.…”
Section: Introductionmentioning
confidence: 99%