Thermal Analysis and Optimization of Graphene Deposition in a Roll-to-Roll Plasma CVD Process

A Heat Transfer Model for Graphene Deposition on Ni and Cu Foils in a Roll-to-Roll Plasma Chemical Vapor Deposition System

“…Graphene deposition on Cu foil exhibits better uniformity than on Ni foil but with a lower thickness of deposited film as web speed increases, as also reported in our previous work [11]. However, the quality of graphene on Cu foil varies significantly with web speed [7,11,14]. Table 1 compares results from Raman spectroscopy of graphene on Ni and Cu foils as a function of web speed.…”

“…The R2R plasma CVD system used here was custom-designed to deposit graphene on a variety of flexible substrates [11,14,32]. As-received nickel (201 annealed nickel, 76.2 µm (or 0.003 inch) thick and 25.4 mm (or 1.00 inch) wide purchased from All Foils Inc.) or copper (110 annealed copper, 76.2 µm (or 0.003 inch) thick and 25.4 mm (or 1.00 inch) wide purchased from Basic Copper Inc.) was placed in a top, free-moving winder, passed through a plasma region where carbon film was deposited because of the high gas temperature in the plasma, and finally collected at the bottom driving winder (Fig.…”

“…4 Results and Discussion 4.1 Estimation of the Foil Temperature using OES Figure 2(a) shows emission spectra from the plasma with and without Cu foil. The emission spectrum without the inclusion of foil exhibits only narrow spectral lines originating from active plasma species (such as Ar, Ar + , H 2 and H) [11,14]. The plasma emission with the presence of Cu foil has similar narrow spectral lines, but with a broad baseline that represents blackbody emission from the Cu substrate.…”

“…1200 K) [13]. Consequently, in R2R processes the web speed controls the growth of graphene because the substrate temperature depends significantly on the duration of exposure to a high-temperature environment [7,11,14].…”