2021
DOI: 10.1115/1.4051505
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A Heat Transfer Model for Graphene Deposition on Ni and Cu Foils in a Roll-to-Roll Plasma Chemical Vapor Deposition System

Abstract: High-throughput production is a major bottleneck for integration of graphene-based technologies in existing and future applications. Here, a heat transfer model is developed to optimize large-scale deposition of graphene on Ni and Cu foils in a roll-to-roll plasma chemical vapor deposition (CVD) system. Temperature distributions in Ni and Cu foils during deposition are recorded with in situ temperature measurements using near-IR optical emission spectroscopy. The model indicates that foil movement significantl… Show more

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“…We attribute the long-term degradation in process efficiency to increased flow resistance in the central region due to the decreasing porosity caused by highly enlarged and coalesced microfibers (Figure 6) that increase flow bypass through annular regions. We note that the issue of increased flow resistance could be readily addressed by adopting a continuous roll-to-roll process 44,45 that exploits the carbon fiber substrate's inherent mechanical flexibility, as shown in prior work on plasma deposition. 46 We further emphasize that, as a result of the localized heated reaction region on the carbon felt, no noticeable carbon deposition occurred on the quartz window and or on the reactor walls over the duration of testing; these issues have been common challenges in prior solar methane decomposition studies.…”
Section: ■ Discussionmentioning
confidence: 99%
“…We attribute the long-term degradation in process efficiency to increased flow resistance in the central region due to the decreasing porosity caused by highly enlarged and coalesced microfibers (Figure 6) that increase flow bypass through annular regions. We note that the issue of increased flow resistance could be readily addressed by adopting a continuous roll-to-roll process 44,45 that exploits the carbon fiber substrate's inherent mechanical flexibility, as shown in prior work on plasma deposition. 46 We further emphasize that, as a result of the localized heated reaction region on the carbon felt, no noticeable carbon deposition occurred on the quartz window and or on the reactor walls over the duration of testing; these issues have been common challenges in prior solar methane decomposition studies.…”
Section: ■ Discussionmentioning
confidence: 99%