Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing

Tamkin, John M.; Milster, Tom D.; Dallas, William J.

doi:10.1364/ao.49.004825

Cited by 33 publications

(8 citation statements)

References 18 publications

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“…The residual wavefront error after applying the phase corrector resembles midspatial frequency (MSF) errors. [25][26][27][28] The step height of the phase plate is on the order of several tens of nanometers, which is comparable with the depth of the highspatial frequency tooling marks generated from a singlepoint diamond turning machine, as shown in Fig. 5.…”

Section: Design Of a Phase Correctormentioning

confidence: 71%

Optical design and system characterization of an imaging microscope at 121.6 nm

et al. 2018

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We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

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Section: Design Of a Phase Correctormentioning

confidence: 71%

Optical design and system characterization of an imaging microscope at 121.6 nm

et al. 2018

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“…The main evaluation parameters of optical performance for optical surfaces include wavefront aberration [19,20], modulation transfer function (MTF) [21], point spread function (PSF) [22] and power spectral density (PSD) [23,24], etc. As a comprehensive index, wavefront aberration can transform with other evaluation parameters [18], so the evaluation parameter based on wavefront aberration was applied in this paper to study the influence of machining errors.…”

Section: Introductionmentioning

confidence: 99%

Effects of Machining Errors on Optical Performance of Optical Aspheric Components in Ultra-Precision Diamond Turning

Zhang

Lin

et al. 2020

Micromachines

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Optical aspheric components are inevitably affected by various disturbances during their precision machining, which reduces the actual machining accuracy and affects the optical performance of components. In this paper, based on the theory of multi-body system, we established a machining error model for optical aspheric surface machined by fast tool servo turning and analyzed the effect of the geometric errors on the machining accuracy of optical aspheric surface. We used the method of ray tracing to analyze the effect of the surface form distortion caused by the machining error on the optical performance, and identified the main machining errors according to the optical performance. Finally, the aspheric surface was successfully applied to the design of optical lens components for an aerial camera. Our research has a certain guiding significance for the identification and compensation of machining errors of optical components.

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“…Mid-spatial frequency (MSF) structure is inescapable in most aspheric and freeform optical systems due to the subaperture tools involved in manufacturing the optical components. Their characteristic frequencies lie between those of low-order aberrations and high-order scattering, and they affect optical performance in ways that continue to present challenges [1][2][3][4]. In particular, the tolerancing of parts is complicated by MSF structure and a perturbative model is often employed to simplify this process [5].…”

Section: Introductionmentioning

confidence: 99%

Validity of the perturbation model for the propagation of MSF structure in 2D

Liang¹,

Forbes²,

Alonso³

2019

Opt. Express

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Assessment of the performance degradation caused by the mid-spatial frequency (MSF) structure on optical surfaces often relies on a perturbation method that dovetails with the familiar sequence of models based on geometrical and physical optics. In the case of imaging systems, the perturbative step yields estimates of wavefronts in the exit pupil which are, in turn, used to extract performance measures such as MTF, PSF, and Strehl ratio. To date, the validity of that perturbation appears to be poorly understood. We present methods to estimate the errors of this approach and thereby arrive at a rule of thumb for its accuracy: the error is approximately equal to the RMS of the MSF structure at its source multiplied by the square of the ratio between a particular Fresnel zone size and a characteristic length of the MSF structure.

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Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing

Cited by 33 publications

References 18 publications

Optical design and system characterization of an imaging microscope at 121.6 nm

Optical design and system characterization of an imaging microscope at 121.6 nm

Effects of Machining Errors on Optical Performance of Optical Aspheric Components in Ultra-Precision Diamond Turning

Validity of the perturbation model for the propagation of MSF structure in 2D

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