2020
DOI: 10.3390/mi11030331
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Effects of Machining Errors on Optical Performance of Optical Aspheric Components in Ultra-Precision Diamond Turning

Abstract: Optical aspheric components are inevitably affected by various disturbances during their precision machining, which reduces the actual machining accuracy and affects the optical performance of components. In this paper, based on the theory of multi-body system, we established a machining error model for optical aspheric surface machined by fast tool servo turning and analyzed the effect of the geometric errors on the machining accuracy of optical aspheric surface. We used the method of ray tracing to analyze t… Show more

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Cited by 13 publications
(8 citation statements)
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“…Traditional ways of monitoring surface roughness cannot be directly used for UPM [15]. Optical components are affected by minute sub variation, and machining errors in UPM can cause cascading faults [16]. The need for the evaluation of the sensors and their applicability for various manufacturing processes are likely to be addressed [17].…”
Section: Figurementioning
confidence: 99%
“…Traditional ways of monitoring surface roughness cannot be directly used for UPM [15]. Optical components are affected by minute sub variation, and machining errors in UPM can cause cascading faults [16]. The need for the evaluation of the sensors and their applicability for various manufacturing processes are likely to be addressed [17].…”
Section: Figurementioning
confidence: 99%
“…As shown in Figure 1 , the machining errors of a weak-stiffness mirror are divided into clamping errors [ 20 ] and cutting errors [ 21 ]. Clamping errors includes elastic deformation errors and plastic deformation errors, while cutting errors can be divided into system errors and random errors.…”
Section: Error Compensation Strategymentioning
confidence: 99%
“…The error signal, e(k), passes through the PID controller, yielding the feedback control signal ufb(k), which is then superimposed with the feedforward control signal, uff(k), to obtain the final output signal, u(k). This process is presented in Equation (5). Through the PID control method based on the modified Prandtl-Ishlinskii inverse hysteresis model, the hysteresis effect of the piezoelectric actuator can be theoretically eliminated.…”
Section: Pid Control Based On the Modified Prandtl-ishlinskii Inverse...mentioning
confidence: 99%
“…The real-time compensation of machining errors was shown to improve the machining accuracy of optical mirrors [3,4]. Due to the effects of various machining factors, the machining error surface shape is complex and distributed at various frequencies [5]. Limited by the performance of machining tools and the accuracy of error measurements, the existing compensation machining methods mainly target low-frequency surface errors and cannot handle medium-and high-frequency surface errors.…”
Section: Introductionmentioning
confidence: 99%