Theoretical study of the secondary electron emission of insulating targets

Ganachaud, J.P.; Mokrani, A.

doi:10.1016/0039-6028(95)00474-2

Cited by 116 publications

(64 citation statements)

References 38 publications

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“…the so called inverse inelastic mean free path, can be expressed as the sum of all the inverse mean free paths of the interactions of the electrons with the target: in particular it is necessary to take into account the inverse mean free path relative to the elastic interactions among the incident electrons and the screened atomic nuclei, λ polaron . Details about this Monte Carlo strategy can be found in Ganachaud and Mokrani, 1) and in Dapor et al 18) Using random numbers one establishes the kind of collision. If the collision is inelastic, the energy loss is calculated according to the specific inelastic scattering cross section (electron-electron, electron-phonon, or electron-polaron).…”

Section: Energy Straggling Strategymentioning

confidence: 99%

“…The Monte Carlo (MC) calculation of the secondary electron emission yield can be performed either taking into account all the details of the many mechanisms of the electron energy loss, [1][2][3] or assuming a continuous slowing down approximation. [4][5][6][7][8] The use of the first approach has stronger physical basis but, due to the detailed description of all the collisions in the secondary electron cascade, it corresponds to a scheme very time consuming.…”

Section: Introductionmentioning

confidence: 99%

“…20,21) The MC scheme based on the energy straggling strategy takes into account all the single energy losses suffered by each electron in the secondary electron cascade. [1][2][3]9,18) This method is very accurate for the calculation of the secondary electron yield and energy distribution as well. [1][2][3]9,11,12,18,19) The mentioned alternative MC scheme to calculate the secondary electron yield, based on a continuous slowing down approximation, uses as input the electron stopping power of the material being considered.…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3]9,18) This method is very accurate for the calculation of the secondary electron yield and energy distribution as well. [1][2][3]9,11,12,18,19) The mentioned alternative MC scheme to calculate the secondary electron yield, based on a continuous slowing down approximation, uses as input the electron stopping power of the material being considered. [6][7][8] The secondary electron yields calculated using the two approaches are very close.…”

Section: Introductionmentioning

confidence: 99%

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Comparison between Energy Straggling Strategy and Continuous Slowing Down Approximation in Monte Carlo Simulation of Secondary Electron Emission of Insulating Materials

Dapor

2011

Progress in Nuclear Science and Technology

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Secondary electrons are commonly used for imaging in scanning electron microscopes, with applications ranging from secondary electron doping contrast in p-n junctions, line-width measurement in critical-dimension scanning electron microscopy and dimensional parameters evaluation in the production of masks and wafers in the semiconductor industry, to the study of biological samples. This paper describes the secondary electron emission yield calculated using two different Monte Carlo approaches. In the first, based on the energy straggling strategy, one takes into account all the single energy losses suffered by each electron in the secondary electron cascade. This method has been demonstrated to be very accurate for the calculation of the secondary electron yield and of the secondary electron energy distribution as well. An alternative way to calculate the secondary electron yield is based on a continuous slowing down approximation and uses as input the electron stopping power of the material being considered. As this work demonstrates that the secondary electron yields calculated using the two approaches are very close and in agreement with the experiment, the much faster continuous slowing down approximation is recommended. On the other hand, if other physical quantities, such as the secondary electron distributions, are required, the energy straggling strategy should be preferred, even if it requires much longer CPU times, due to its stronger physical background.

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Section: Energy Straggling Strategymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Comparison between Energy Straggling Strategy and Continuous Slowing Down Approximation in Monte Carlo Simulation of Secondary Electron Emission of Insulating Materials

Dapor

2011

Progress in Nuclear Science and Technology

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“…Ganachaud et.al. [4][5][6] discuss energy transfers on piezoelectric material within electron-electron collision, electron-phonon (light particle) collision, electron-solid elastic collision, and polarization effects in detail. Ganachaud, Attard and Renoud [5] present a model of space charge build-up in an insulating target under electron bombardment.…”

Section: Introductionmentioning

confidence: 99%

Characteristics of Response of Piezoelectric Actuators in Electron Flux Excitation

Hadinata¹,

Main²

2003

itbj.eng.sci.

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Abstract. In this paper the working parameters of non-contact strain control for piezoelectric ceramics are evaluated. The piezoelectric material functions as an actuator that transforms electrical into mechanical energy, and the electrical input is carried out by electron flux on the positive surface. The sample is exposed to some quasi-static inputs, and its responses are recorded using strain gages. The data shows faster and more stable response in the positive regime, but significantly slower response with drift in the negative regime. An electron collector is introduced on the positive surface to enhance the response in the negative regime. Theoretical analyses of energy transfer and electron movements is discussed, and a string of working conditions for controlling the surface strain of piezoelectric material are given as conclusions.

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