“…For example, it is reported that a temperature of $300 1C is required to initiate the a-hydrogen abstraction (reaction (1)), which is an important step for neopentane elimination leading to ZrQC bond formation [26]. Consistent with this kinetic limitation, growth of ZrC using ZrNp 4 in AA-MOCVD at less than 400 1C did not result in film growth [20].…”