2010
DOI: 10.1002/pssa.200983302
|View full text |Cite
|
Sign up to set email alerts
|

Theoretical simulation and preparation of binary and ternary combinatorial libraries by thermal PVD

Abstract: Binary and ternary composition spread material libraries were prepared using a thermal physical vapor deposition system with three separated heating sources and adjustable chamber geometry. In this work, we present binary Cu84-20Al16-80 and Zn71-8Mg29-92 libraries as well as a ternary Cu67-6Ag81-13Mg66-12 system with a thickness around 300 nm. The composition of the obtained films was determined by automated energy dispersive X-ray spectroscopy and the data further used to develop a mathematical model to simul… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

0
6
0

Year Published

2011
2011
2022
2022

Publication Types

Select...
6
1

Relationship

3
4

Authors

Journals

citations
Cited by 16 publications
(6 citation statements)
references
References 31 publications
(31 reference statements)
0
6
0
Order By: Relevance
“…This is due to the geometry of the co‐deposition setup (Fig. ) combined with the cos ‐law for the thickness variation along the substrate during thermal evaporation . Weak gradients were measured also in the concentration of both Mg and Zn along the sample.…”
Section: Resultsmentioning
confidence: 96%
“…This is due to the geometry of the co‐deposition setup (Fig. ) combined with the cos ‐law for the thickness variation along the substrate during thermal evaporation . Weak gradients were measured also in the concentration of both Mg and Zn along the sample.…”
Section: Resultsmentioning
confidence: 96%
“…This produced a thickness gradient along the length of the sample due to the Knudsen cosine law of evaporation, which in the present study had a measured cosine exponent of 3.5. [30] This thickness gradient was prepared intentionally. Neither aluminium nor its oxide are photoactive, thus the thin metal film is reflecting part of the light and the thickness gradient results in a light intensity gradient that can be detected by the PE-SDCM.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, in any co‐deposition from vapour phase a compositional gradient is expected to be found on the substrate surface. This is due to the cosine law governing the thickness distribution across the substrate. When two or more materials are simultaneously sputtered from different targets, each material may in principle produce its own thickness distribution.…”
Section: Resultsmentioning
confidence: 99%