2009
DOI: 10.1007/s12541-009-0035-y
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Theoretical and experimental analysis of material deformation by microcontact

Abstract: This paper reports on an investigation of contact damage induced in molds and substrate materials used in microand nanoimprint lithography. Silicon, polydimethylsiloxane (PDMS), glass, and silicon carbide were studied. A finite element analysis using ABAQUS software was conducted to investigate the stress induced in mold and substrate materials when they come in contact with each other at a uniaxial pressure of 1 MPa. A spherical indentation experiment was conducted for a model study for various indentation lo… Show more

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Cited by 4 publications
(3 citation statements)
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“…[15][16][17][18][19][20] Ryu et al studied indentation on silicon wafer, glass and silicon carbide. 21 Zhao et al observed the indentation damage modes on ground surface of optical glass. 22 Ductile regime grinding of brittle materials has been investigated experimentally by different researchers.…”
Section: Introductionmentioning
confidence: 99%
“…[15][16][17][18][19][20] Ryu et al studied indentation on silicon wafer, glass and silicon carbide. 21 Zhao et al observed the indentation damage modes on ground surface of optical glass. 22 Ductile regime grinding of brittle materials has been investigated experimentally by different researchers.…”
Section: Introductionmentioning
confidence: 99%
“…Imprinting lithography describes the general process of using a mold, template or stamp to produce a pattern by replication, which could be categorized as 'molding and embossing' and 'transfer printing'. 1,2 Molding and embossing includes hot embossing, nanoimprinting, 3-5 step and flash imprint, 6 and UV-imprinting, 7,8 whereas micro-and nano-contact printing 9,10 are termed transfer printing processes. Hot embossing and nanoimprinting use thermal reflow under high temperature and high pressure conditions, whereas UV-imprinting uses UV curing of lowviscosity monomer or polymer at room temperature and low pressure.…”
Section: Introductionmentioning
confidence: 99%
“…Micro or nanometer patterns are obtained by imprinting a pre-patterned mold into a substrate by transferring the patterns using UV curable resin. [11][12][13][14][15][16][17][18][19] In these applications, the interfacial energy between the hard/soft material layers is considered to be the significant factor in determining the characteristics of the laminate system for various applications. It has been proposed that the interfacial energy is the controlling parameter for tailoring the properties of the entire laminate system.…”
Section: Introductionmentioning
confidence: 99%