Micropatterning on roll surface using photo-lithography processes

Abstract

A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll's surface.

Reduction of Friction Using Microabrasive Air Jet Machining

“…Surface texturing can be achieved using techniques such as photolithography [ 1 ], electron beam lithography [ 2 ], or radio-frequency magnetron sputtering [ 3 ]. Takigawa [ 4 ] utilized a high-voltage electron beam lithography method to form 0.75 µm lines on PMMA and reported that using a weak developer such as isoamyl acetate (IAA) improves the dimensional accuracy of resist patterns drawn on uneven surfaces.…”

Roll-type photolithography for continuous fabrication of narrow bus wires

“…Recently invented micro/nanofabrication processes in various fields share a close relationship to continuous production systems, such as roll-based fabrication systems, which enable mass fabrication with high production yields [1][2][3][4][5][6][7]. Despite its discontinuity limitation and the recent advancements in novel micro/nanofabrication processes [8][9][10], photolithography remains the main production method for various micro/nanostructures [11][12][13] because of its high reproducibility, reliability, and matured pre-and post-processes, such as deposition, aligning, and etching.…”

Development of a continuous injection direct rolling imprint system for microstructure thin-plate

“…The popularity of this technique can be attributed to its high level of flexibility in process Roll-to-roll imprint lithography technology produces polymer melts via the effects of cooling, friction, and roll pressure to form microstructures on the surface of a thin polymer plate. Kim and Kim (2011) studied a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process. Jiang et al (2007) could duplicate the average diameter of 210 and a 12 μm-deep micro-lens array on the surface of a thin polymer plate using hybrid extrusion rolling embossing.…”