In this study, we co-sputtered zinc dioxide and copper in order to manufacture a composite thin film. We then used atomic force microscopy (AFM), scanning electron microscopy and energydispersive X-ray spectroscopy to investigate the surface morphology of samples. We annealed four samples to temperatures 100 • C,200 • C,400 • C and 800 • C for 90 minutes. Afterwards, we employed height distribution, roughness, permutation entropy(PE) and fractality of the height data from AFM to analyse samples theoretically. Our results reveal that although the roughness will increase by temperature and the multifractal spectrum widens by it; the PE does not change both from 100 • C to 200 • C and from 400 • C to 800 • C. Both PE and height distribution are changing meaningfully only in increasing the temperature from 200 • C to 400 • C.