The Use of Finite Element Modeling for Calculating the C-V Curve of Capacitor Mems Microphone

Grigor’ev, D. M.; Godovitsyn, I. V.; Amelichev, V. V.; Generalov, S. S.; Polomoshnov, S. A.

doi:10.1134/s1063739717060075

Cited by 2 publications

(1 citation statement)

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“…The biased voltage magnitude can be chosen on the basis of the "pull-in" voltage. The pull-in voltage varies with the sensing gap variations [60]. The "pull-in" voltage (V PI ) can be represented by the following equation as presented in [61]:…”

Section: Capacitive Microphonesmentioning

confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented. Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance. An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented. The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained. This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.

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Section: Capacitive Microphonesmentioning

confidence: 99%