Condenser MEMS Microphone

Grigoriev, D. M.; Generalov, S. S.; Polomoshnov, S. A.; Nikiforov, S. V.; Amelichev, V. V.

doi:10.1134/s1063739720010084

Cited by 1 publication

(1 citation statement)

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“…In the livestock sector MEMS acoustic transducers have been used to estimate the state of health of animals [5] while in industrial fields they have been used for noise and vibration measurements [6], as resonant photoacoustic combustion gas monitors [7] or as hydrophones for pipeline leak detection [8]. In recent years MEMS acoustic sensors and actuators have been extensively produced for consumer applications as microphones for wearable devices [9,10] and voice controllable systems [11,12] or as microspeakers for in-ear devices [13,14]. MEMS acoustic transducers rely on the conversion of energy between mechanical/acoustic and electrical domains which can be achieved by different transduction mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency

et al. 2022

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The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode driving and sensing. The piezoelectric MEMS transducer has been fabricated using the PiezoMUMPs technology, and it operates in a plate flexural mode exploiting a 6 × 6 mm doped silicon diaphragm with an aluminum nitride (AlN) piezoelectric layer deposited on top. The piezoelectric layer can be actuated by means of electrodes placed at the edges of the diaphragm above the AlN film. By applying an adjustable bias voltage Vb between two properly-connected electrodes and the doped silicon, the d31 mode in the AlN film has been exploited to electrically induce a planar static compressive or tensile stress in the diaphragm, depending on the sign of Vb, thus shifting its resonant frequency. The working principle has been first validated through an eigenfrequency analysis with an electrically induced prestress by means of 3D finite element modelling in COMSOL Multiphysics®. The first flexural mode of the unstressed diaphragm results at around 5.1 kHz. Then, the piezoelectric MEMS transducer has been experimentally tested in both receiver and transmitter modes. Experimental results have shown that the resonance can be electrically tuned in the range Vb = ±8 V with estimated tuning sensitivities of 8.7 ± 0.5 Hz/V and 7.8 ± 0.9 Hz/V in transmitter and receiver modes, respectively. A matching of the series and parallel resonant frequencies has been experimentally demonstrated in voltage-mode driving and sensing by applying Vb = 0 in transmission and Vb = −1.9 V in receiving, respectively, thereby obtaining the optimal acoustic emission and detection effectiveness at the same operating frequency.

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