The use of a high-voltage discharge at low pressure for 3D ion implantation

Khvesyuk, V. I.; Цыганков, П. А.

doi:10.1016/s0257-8972(97)00117-5

Cited by 29 publications

(24 citation statements)

References 3 publications

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Section: Introductionmentioning

confidence: 99%

“…The three-dimensional ion implantation (3DII) [2] is a superficial modification process generated by high voltage discharges at low pressures, which turns on in the left branch of the Paschen curve, and it is used as an alternative to improve physical and chemical properties of materials [3][4][5][6]. The pioneers in the study of this type of discharge were Klarfeld and Pokrovskaya-Soboleva [7] and McClure [8].…”

Section: Introductionmentioning

confidence: 99%

“…The reactor JUPITER (Join Universal of Plasma and Ion Technologies Experimental Reactor) [9] is the only equipment built based on this technology that allow the implantation of ions in solid substrates of metallic and non-metallic species. The parameters that characterize the implementation are: the ion's type, the ion's energy and the implanted dose [1,2,[10][11][12].The calculation of superficial density of ions implanted in some material depends mainly of time of treatment, density of ionic current, repetition frequency and pulse duration, the secondary emission ion-electron coefficient of material and the area of the cathode. This paper presents a computational tool, which allows us estimate the value for implanted dose on the surface of solid substrates after a process of surface modification by ion 3DII.…”

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confidence: 99%

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Estimate of the concentration of implanted ions in solid substrates using a web application

Vera-Rivera¹,

Gutiérrez

Dulce-Moreno³

et al. 2016

J. Phys.: Conf. Ser.

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Abstract. The three-dimensional ionic implantation technique (3DII) is used to modify the surface of solid metal by electric discharges pulsed of high voltage at low pressures. Knowing the density of ions implanted in the surface of a functional element, in a faster and estimated way, will help to optimize the surface treatment technique. Therefore, a web application was developed which from experimental parameters established in a process 3DII estimates the concentration of ions implanted in solid metal substrates. The results obtained in this research work demonstrate the feasibility of the computational web tool to perfect the experiments of surface modification by ion implantation. IntroductionThe modification superficial consists in alter the composition and structure of materials either by creating a coating (with typical thicknesses of a few microns) or by introducing new elements into the surface (dopant ions) in nanometric depths [1].The three-dimensional ion implantation (3DII) [2] is a superficial modification process generated by high voltage discharges at low pressures, which turns on in the left branch of the Paschen curve, and it is used as an alternative to improve physical and chemical properties of materials [3][4][5][6]. The pioneers in the study of this type of discharge were Klarfeld and Pokrovskaya-Soboleva [7] and McClure [8]. The reactor JUPITER (Join Universal of Plasma and Ion Technologies Experimental Reactor) [9] is the only equipment built based on this technology that allow the implantation of ions in solid substrates of metallic and non-metallic species. The parameters that characterize the implementation are: the ion's type, the ion's energy and the implanted dose [1,2,[10][11][12].The calculation of superficial density of ions implanted in some material depends mainly of time of treatment, density of ionic current, repetition frequency and pulse duration, the secondary emission ion-electron coefficient of material and the area of the cathode. This paper presents a computational tool, which allows us estimate the value for implanted dose on the surface of solid substrates after a process of surface modification by ion 3DII. These calculations are faster and correct that traditional form. The web application is the result of a technological applied research, which can be used at any time, from anywhere, in different electronic devices (computers, tablets, mobile phones, etc.).

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

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Estimate of the concentration of implanted ions in solid substrates using a web application

Vera-Rivera¹,

Gutiérrez

Dulce-Moreno³

et al. 2016

J. Phys.: Conf. Ser.

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“…This modified reactor is named MOSMET 5 . It is significant that the MOSMET reactor permits not only to deposit metal vapor or molecules (such as TiN 2 ) on the surface through the arc discharge or the ion implantation through the high voltage discharge but also to give a hybrid treatment which is realized at simultaneous functioning of the electric arc discharge and the high voltage discharge related to the left branch of the Paschen curve 6,7 . The hybrid treatment of metals which modifies the structure of their surface and sub-surface layers can improve such characteristics as the surface microhardness and resistance to corrosion including resistance to corrosion produced by biologic species 8,9 .…”

Section: Introductionmentioning

confidence: 99%

A new method for surface modifications of carbon steels and alloys

Dugar-Zhabon

Moreno

Villamizar³

et al. 2012

Mat. Res.

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A three-dimensional treatment method involving implantation of ions into solids immersed in a high voltage pulse discharge ignited on the left-hand-branch of the Paschen curve was elaborated about fifteen years ago. This method, named 3DII for short, has been used in the equipment JUPITER (Joint Universal Plasma and Ion Technologies Experimental Reactor) for practical purposes. Hereafter, the need for better means to improve the metal surface protection against aggressive media prompted an elaboration of the MOSMET concept which is based on a hybrid treatment involving the processes of implantation and deposition. It is significant that the processes can be set into action simultaneously or separately. In this article, the conditions of hybrid treatment of AISI SAE 1010, 1020 y 1045 carbon steels, their subsequent electrochemical diagnostics and corrosion test results are described. The corrosion rate of the samples treated by titanium hybrid discharge is found approximately an order of magnitude smaller as compared to the non-treated samples.

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“…Resumen-La implantación iónica tridimensional (3DII) [1] es una técnica de tratamiento superficial avanzado [2], la cual es realizada en el dispositivo JUPITER (Joint Universal Plasma and Ion Technologies Experimental Reactor) [3] mediante una descarga pulsada de alto voltaje a bajas presiones en un gas encendida en la rama izquierda de la curva de Paschen [4]- [5], cuyo objetivo principal es mejorar las propiedades tribológicas. Para la protección superficial de materiales expuestos en medios agresivos se realiza la modificación del dispositivo JUPITER que consiste en la instalación en de un vaporizador de arco eléctrico en la cámara de descarga [6].…”

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