The study on characterizations of SrTiO3 thin films with different growth temperatures

Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures

“…3, TiN4). The result was also similar to Kınacı's work [28] that the roughness root mean square (RMS) value of the RF magnetron sputtered SrTiO 3 film increased from 0.295 nm at the temperature of 200 • C to 1.195 nm at 500 • C. It can be noted that the surface of films becomes rougher with the elevation of the substrate temperatures Fig. 4 gives the critical load, nanoindentation hardness and elastic modulus of TiN films deposited at different substrate temperatures.…”

Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature

“…All RT-grown STO samples were amorphous in their as-deposited state, as determined by GIXRD measurements. GIXRD patterns of as-deposited STO 20 , annealed STO 0 , STO 10 and STO 20 films are demonstrated in [26,27,30]. The calculated lattice parameter a was slightly higher than that given in the ICSD reference (i.e., 3.9110 Å)…”

“…Furthermore, in nanostructured thin film form they have ability to show multifunctional properties [18]. STO nanostructured thin films have been deposited on a variety of substrates using various deposition techniques including electron cyclotron resonance (ECR) ion beam sputtering [19], atomic layer deposition [20], pulsed laser deposition [21,22], molecular beam epitaxy [23], metal organic chemical vapor deposition [24], and sputtering [1,[25][26][27]. Among these methods, sputtering is simple, low cost and effective thin film growth technique which is compatible for industrial scale as well.…”

Postdeposition annealing on RF-sputtered SrTiO3 thin films

“…This might be originating from lower deposition temperature. 30 It is known that different substrate temperatures and/or annealing temperatures produce different material characteristics. [31][32][33][34][35] Survey and high-resolution XPS scans of STO films were recorded as a function of annealing temperature and time.…”