2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings 2006
DOI: 10.1109/icsict.2006.306603
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The Study of ZnO Photoconductive UV Detector

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“…In order to obtain high performance ZnO photoconductors, different methods such as surface treatment and covering by other materials have been used by several groups [ 18 20 ]. The oxygen plasma treatment is found to dramatically enhance the UV detection properties of ZnO, reducing the decay time constant (to below 50 μs) and increasing the on/off ratio of photocurrent (to over 1,000) with high UV responsivity (1–10 A/W) [ 18 ].…”
Section: Zno-based Photodetectorsmentioning
confidence: 99%
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“…In order to obtain high performance ZnO photoconductors, different methods such as surface treatment and covering by other materials have been used by several groups [ 18 20 ]. The oxygen plasma treatment is found to dramatically enhance the UV detection properties of ZnO, reducing the decay time constant (to below 50 μs) and increasing the on/off ratio of photocurrent (to over 1,000) with high UV responsivity (1–10 A/W) [ 18 ].…”
Section: Zno-based Photodetectorsmentioning
confidence: 99%
“…The reason for this result may be that oxygen plasma treatment can effectively suppress the chemisorption effect and the oxygen vacancy in ZnO films. Additionally, surface HCl treatment [ 19 ] and SiO 2 covering [ 20 ] on the surface of devices can increase the photoresponsivity, but they also can increase the dark current due to the damage on ZnO films. More recently, Sun and coworkers reported a photoconductive detector based on intentionally Ga-doped ZnO film on quartz by RF sputtering [ 27 ].…”
Section: Zno-based Photodetectorsmentioning
confidence: 99%