1989
DOI: 10.1016/0040-6090(89)90506-3
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The structure of beryllium films

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Cited by 8 publications
(2 citation statements)
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“…As explained earlier, the oxygen is due to the surface layer of BeO. Ni, Fe and Al impurities are thought to be from the Be sputtering target, as discussed by Adams et al [21]. Finally, since C has a stronger signal in the irradiated sample, it can be concluded that this is due to the carbon compounds in the vacuum system and from mechanical-pump oil, as stated before.…”
Section: Irradiationmentioning
confidence: 65%
“…As explained earlier, the oxygen is due to the surface layer of BeO. Ni, Fe and Al impurities are thought to be from the Be sputtering target, as discussed by Adams et al [21]. Finally, since C has a stronger signal in the irradiated sample, it can be concluded that this is due to the carbon compounds in the vacuum system and from mechanical-pump oil, as stated before.…”
Section: Irradiationmentioning
confidence: 65%
“…Beim Beryllium werden dünne Filme hauptsächlich über die physikalische Gasphasenabscheidung (PVD) erzeugt . Beispielsweise hat man Be‐Filme auf Kochsalzsubstraten, durch die Verdampfung von Be im Hochvakuum, generiert .…”
Section: Wie Ist Der Gegenwärtige Stand Der Berylliumchemie?unclassified