The structure and electrical resistance of thin scandium films (II). F.C.C.–lattice phase observed in films obtained in a vacuum of 10⁻⁸ Torr

Abstract

Phase composition of the Sc-films up to 200 A thick obtained in a vacuum of 3 . lo-" Tom, condensation rate being w r 1 t o 6 &s and w N 40 A/s up to Tom, have been studied by an electron-diffraction examination. A phase with an f.c.c.-lattice and a lattice parameter a = 4.76 t o 4.80 f 0.01 A 0.0lA is observed in films d 5 60 A thick, whilst with films having a thickness d 2 90 A a h.c.p.-phase is characteristic for solid specimens. Two-phase composition is observed in an interjacent interval of thicknesses.An analysis performed permitted to conclude that the f.c.c.-phase observed is a ScH,hydride forming during the post-condensation delay time on a basis of a poly-morphic modification. MeTOAOM 3JIeKTpOHOrpa@HH IlpOBeHeHbI ElCCJIeAOBaHtiR @a3OBOrO COCTaBa IIJIeHOKC TOJIWHHOfi A0 200 8, IIOJIy9eHHbIX B B a K y y M e OT 3 9 lo-' T O P (CKOPOCTb KOHAeHCalUiti npIl TOJIIUIIHe d 5 60 A B IlJIeHKaX Ha6JIIOAaeTCII @a3a C r u~-p e l I I & T K O f i ti I I a p a -MaCCtiBHbIX 06pa3so~. B I I p O M e X y T O~H O M HHTepBaJIe TOJIIUHH ~a 6 n m~a e~c 1 1 AByX@33€IbIfi COCTaB. n p 0 B e A e H H b I f i suIaJIti3 II03BOJIReT CHeJIaTb BbIBOH, 9TO ~a 6 n m~a e~a a ruH-@a3a IIBJI-ReTCII I'EIAPHAOM SCH,, KOTOpbIfi @OpMHpYeTCR B IIpOIV?CCe IlOCJIeKOHAeHCaUHOHHOfi BbI-A e p M K H H a OCHOBe IIOJIHMOp@HOfi r~H -M O H U @ H K W U H . w 1 : I -6 A/c) AO MeTpoM a = 4,76 -4,80 5 O,OI A, a npti d 2 90 A -r~~Y -~$ a a a , T t i n t i w r a R AJIII Top (w = 40 &). V. B. LOBODA, I. E. PROTSENKOFilm thickness was measured by means of a precision microeveihing using a frequency meter, Type Y3-34A. Type MX-7301 monopolar mass spectrometer was used to control a composition of residual gases. Specific electrical resistance was measured following a method described by LOBODA, PROTSENKO.