The State of the Theory of Vacuum Arc Cathodes

Hantzsche, E.

doi:10.1002/ctpp.19830230108

Cited by 26 publications

(6 citation statements)

References 48 publications

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“…With a large scatter (due to the erratic nature of the movement) the measuring points fall in the interval of 1-2 m S -' . This is not an absolute value, because the average velocity of retrograde motion depends on the distance covered (2.5-3.5 mm in the present case) due to the random nature of the elementary displacement steps (Hantzsche 1977) which still remains with moderate magnetic fields. But in any case these velocities are markedly smaller than with forward motion.…”

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confidence: 66%

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On the plasma density of metal vapour arcs

Jüttner¹

1985

J. Phys. D: Appl. Phys.

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The plasma density of metal vapour arcs in vacuum is discussed on the basis of ion currents measured at cylindrical walls around the electrodes. It is suggested the density varies inversely with the square of the distance to the cathode spot, reaching values up to 1026 m-3 within the spot. From the distribution of the plasma ions it is concluded that the ion current to the cathode area within the spot reaches several per cent of the arc current. Up to a pressure of at least 2 atm, the background pressure does not change the internal spot processes that lead to retrograde motion.

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confidence: 66%

“…These craters indicate a large pressure within the spot, because they show violent displacement of molten metal (Juttner 1979). Various processes may contribute to this pressure (Hantzsche 1983), the high density plasma being more important than the neutral vapour component. Ivanov et a1 (1984) suggest plasma densities in excess of m-3.…”

Section: Introductionmentioning

confidence: 99%

On the plasma density of metal vapour arcs

Jüttner¹

1985

J. Phys. D: Appl. Phys.

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“…3 The effect of different cathode mirterials upon the crit,ical melting current for specific materials Tab. 4 The effect of different cathode materials upon the anode spot threshold current for aluminium anodes [ [K -thermal conductivity (W/m-K); e -mean density (kg/m3); C -specific Heat (J/kg-K)], then materials with larger thermal characteristics had higher threshold currents for anode spot formation. The relationship between the critical current I,, and the thermal characteristic is then…”

Section: R I T I C a L C U R R E N T Smentioning

confidence: 99%

“…Critical current (I,) at which anode melting occurs for various anode materials Tab. 4 The effect of different cathode materials upon the anode spot threshold current for aluminium anodes [ If both electrodes are the same material, then the anode characteristics dominate, as shown in the typical results of RICH et al [30] in Tab. 5.…”

Section: Tabmentioning

confidence: 99%

A Review of Anode Phenomena in Vacuum Arcs

Miller

1989

Contrib. Plasma Phys.

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This paper discusses arc modes at the anode, experimental results pertinent t o anode phenomena, and theoretical explanations of anode phenomena.A vacuum arc can exhibit five anode discharge modes: (1) a low current mode in which the anode is basically passive, acting only as a collector of particles emitted from the cathode; (2) a second low current mode that can occur if the electrode material is readily sputtered (a flux of sputtered atoms will be emitted by the anode); (3) a footpoint mode, characterized by the appearance of one or more small luminous spota on the anode (footpoints are generally much cooler than the true anode spota present in the last two modes); (4) an anode spot mode in which one large or several small anode spots are present (such spots are very luminous, have a temperature near the atmospheric boiling point of the anode material, and are a copious source of vapor and ions); and ( 5 ) an intense arc mode where an anode spot is present, but accompanied by severe cathode erosion.The arc voltage is relatively low and quiet in the two low current. modes and the intense arc mode. It is usunlly high and noisy in the footpoint mode, and it can be either in the anode spot mode. Anode erosion is low, indeed negative, in the two low current modes, and it is low to moderate in thc footpoint mode. Severe anode erosion occurs in both the anode spot and intense arc modes.The dominant mechanism controlling the formation of an anode spot appears to depend upon the electrode geometry, the electrode material, and the current waveform of the particular vacuum i i rc being considered. I n specific experimental conditions, either magnetic constriction in the gap plasma, or gross anode melting, or local snode evaporation can trigger the transition. However, the most probable explanation of anode spot formation is a combination theory, which considers magnetic constriction in the plasma together with the fluxes of material from the anode and cathode as well as the thermal, electricnl, and geometric effects of the anode in analyzing the behavior of the anode and the nearby plasmn.

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“…Cathodic arc ion coating technology which belongs to PVD is widely used in industry. The fundamental of the technology [6][7][8] is that a metal target which is used as evaporative cathode is placed in a vacuum vessel to generate the arc discharge between it and the anode shell. The target evaporates and dissociates to form a plasma, which is used to deposit a coating of the substrate material.…”

Section: Introductionmentioning

confidence: 99%

Research Progress of Nitride Coating Process Prepared by Cathodic Arc Ion Plating

Wang

Sun²,

Zhang³

et al. 2022

SSP

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As the main process of carbide tool coating fabrication, cathodic arc ion plating plays an important role in modern industrial production. This paper introduces the influence of process parameter selection on the coating properties of tools by cathodic arc ion plating. The process parameters mainly include nitrogen partial pressure, negative bias pressure and arc current, and the coating properties are mainly characterized by deposition rate, phase composition, coating hardness and surface quality. It can optimize the selection of process parameters on modern industrial production.

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The State of the Theory of Vacuum Arc Cathodes

Cited by 26 publications

References 48 publications

On the plasma density of metal vapour arcs

On the plasma density of metal vapour arcs

A Review of Anode Phenomena in Vacuum Arcs

Research Progress of Nitride Coating Process Prepared by Cathodic Arc Ion Plating

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