The stabilization system of primary oscillation for a micromechanical gyroscope

Baranov, Pavel; Nesterenko, Tamara G.; Tsimbalist, E.I.; Vtorushin, Sergey

doi:10.1088/1361-6501/aa66c6

Cited by 7 publications

(3 citation statements)

References 18 publications

(29 reference statements)

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“…Comb structures 16 are used as sensors in the drive oscillation channel. The drive oscillation control system with lock-in detection (Baranov et al , 2015) is described by Baranov et al (2017). The silicon structure is anchored to the glass substrate.…”

Section: Operating Principle Of Gyro-accelerometer Modulementioning

confidence: 99%

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Baranov

Nesterenko

Barbin

et al. 2019

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Purpose Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approach The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. Findings Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes. Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

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Section: Operating Principle Of Gyro-accelerometer Modulementioning

confidence: 99%

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Baranov

Nesterenko

Barbin

et al. 2019

Self Cite

View full text Add to dashboard Cite

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“…The United States relies mainly on universities [5]. The main MEM research university is Stanford University, Georgia Institute of Technology, University of California, Los Angeles, and Dreiberi Laboratory (CSDL).…”

Section: State Of the Artmentioning

confidence: 99%

Circuit Design Based on Capacitive Micromechanical Gyroscope

2017

IJOMAM

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-The purpose is to study the circuit design based on capacitive micromechanical gyroscope. In order to detect a very weak angular rate signal, the signal needs to be properly amplified and demodulated. To this end, an improved continuous-time front-end readout circuit is proposed. The front-end structure is a charge-sensitive amplifier (CSA) with a T-resistor network as a feedback resistor. In order to reduce the noise of the front-end amplifier, the size of the input transistor is optimized accordingly. In addition, in the demodulation process, the comparator demodulation clock signal usually has a certain phase shift. Therefore, this will cause errors in the output signal. For this problem, a simple and effective error correction algorithm is put forward. By the validation of simulation, the results show that the error rate is reduced from 13.7% to 0.3% after the error correction algorithm. Therefore, it can be concluded that the circuit can correctly demodulate the angular rate signal. The algorithm can effectively reduce the error caused by demodulation.

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“…Hence, closed-loop control drive loops based on automatic gain control (AGC) were commonly used to maintain the constant amplitude vibration of sensitive structures at their resonant frequencies [ 9 , 10 ]. In the closed-loop drive circuit of a silicon gyroscope, due to the highly non-linear component in the acceleration-to-speed signal transfer function, it was difficult to obtain an accurate analytical solution for the loop-transfer function [ 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

Ding

Liu

et al. 2022

Sensors

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The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method and period average method, cannot analyze the dynamic characteristics of the system. In this work, a linearized amplitude control model of the silicon gyroscope drive loop was established to analyze the stability and set-up time of the drive loop, and the vibration conditions of the silicon gyro were obtained. According to the above results, a new silicon gyroscope interface circuit was designed, using a 0.35 mm Bipolar-CMOS-DMOS (BCD) process, and the chip area was 4.5 mm × 4.0 mm. The application-specific integrated circuit (ASIC) of the silicon gyroscope was tested in combination with the sensitive structure with a zero stability of 1.14°/hr (Allen). The test results for the ASIC and the whole machine prove the correctness of the theoretical model, which reflects the effectiveness of the stability optimization of the closed-loop controlled drive loop of the silicon gyroscope circuit.

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The stabilization system of primary oscillation for a micromechanical gyroscope

Cited by 7 publications

References 18 publications

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Circuit Design Based on Capacitive Micromechanical Gyroscope

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

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