Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

Abstract

The existing analysis methods for the silicon gyroscope drive loop, such as the perturbation method and period average method, cannot analyze the dynamic characteristics of the system. In this work, a linearized amplitude control model of the silicon gyroscope drive loop was established to analyze the stability and set-up time of the drive loop, and the vibration conditions of the silicon gyro were obtained. According to the above results, a new silicon gyroscope interface circuit was designed, using a 0.35 mm Bipolar-CMOS-DMOS (BCD) process, and the chip area was 4.5 mm × 4.0 mm. The application-specific integrated circuit (ASIC) of the silicon gyroscope was tested in combination with the sensitive structure with a zero stability of 1.14°/hr (Allen). The test results for the ASIC and the whole machine prove the correctness of the theoretical model, which reflects the effectiveness of the stability optimization of the closed-loop controlled drive loop of the silicon gyroscope circuit.

Adaptive Fuzzy Modal Matching of Capacitive Micromachined Gyro Electrostatic Controlling

“…Static control is an easily achieved online control method, which is helpful in speeding up the response to noise interference and improving detection accuracy. Electrostatic control technology has become the optimal choice for modal matching control of micro gyro systems [27].…”

Robust tracking and consensus control of a MEMS gyroscope multi-agent systems with H-infinity performance: A transfer function approach

“…Nevertheless, sensitivity of the gyroscope is degraded due to the different factors like imperfections in the fabrication process, environmental changes which result in a change of parameters, the mechanical coupling of both axes, and several types of noises alongside axes. So, to boost the performance of the MEMS gyroscope multi-agent systems and control the drive axis oscillations, both closed-loop, and open-loop controllers can be used [5][6][7][8][9][10][11][12]. Still, there exists an error in the measurement of the angle of rotation in the open-loop drive axis control of MEMS gyroscopes if any single system parameter is changed.…”

“…Still, there exists an error in the measurement of the angle of rotation in the open-loop drive axis control of MEMS gyroscopes if any single system parameter is changed. Similarly, closed-loop driving control techniques, for example, phase-locked loop control, force balancing feedback control [6], automatic gain control [7], dynamic surface control (DSC) [8], adaptive control [9][10], and Lyapunov control [11] increased the throughput and range of the MEMS gyroscope than open-loop control, still, these are affected by the parameter variations and quadrature error which affects the angular rate. Most of the already proposed control schemes only present mathematical models and do not consider uncertainties as in [6][7][8][9][10][11][12].…”