1991
DOI: 10.1109/27.106806
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The space-time-averaging procedure and modeling of the RF discharge

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Cited by 22 publications
(14 citation statements)
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“…The criterion for a stable stationary current in the electrical circuit with constant voltage of the power supply is [16]:…”
Section: Influence Of Frequency On the Current Stability In The Electmentioning
confidence: 99%
“…The criterion for a stable stationary current in the electrical circuit with constant voltage of the power supply is [16]:…”
Section: Influence Of Frequency On the Current Stability In The Electmentioning
confidence: 99%
“…An explanation of this phenomenon is given in Section IV. The analytical solution for the electron energy distribution function of electrons is presented in Section V. We performed self consistent calculations of RFC discharges over a wide range of pressures, and power densities according to the fast modeling techniques, developed in [5] and [6].…”
mentioning
confidence: 99%
“…The approximations have been discussed in detail in [5] and [6], and we reproduce them briefly below.…”
mentioning
confidence: 99%
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