Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures

Berezhnoi, S. V.; Kaganovich, Igor; Mišina, M.; Bogaerts, Annemie; Gijbels, R.

doi:10.1109/27.799810

Cited by 10 publications

(10 citation statements)

References 12 publications

(32 reference statements)

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“…Therefore, the presence of high‐energy electrons in the centre of the discharge of a high‐pressure RF microdischarge is related to the sheath width. This contrasts with the typical situation encountered in low‐pressure discharges where the presence of high‐energy electrons in the centre of the discharge is related to the non‐locality of high energy electrons 181…”

Section: Diagnostics and Simulations Of Microplasmasmentioning

confidence: 58%

Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Iza

Kim

Lee

et al. 2008

Plasma Processes & Polymers

478

339

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Thanks to their portability and the non‐equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non‐equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high‐pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.

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Section: Diagnostics and Simulations Of Microplasmasmentioning

confidence: 58%

Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Iza

Kim

Lee

et al. 2008

Plasma Processes & Polymers

478

339

View full text Add to dashboard Cite

show abstract

“…For the smallest microplasmas discussed in this Letter, however, the mode could not be sustained and high-energy electrons can be considered to be in local equilibrium ( " 7 m L). It is also noted that contrary to what happens in low-pressure discharges [21,22], the ion flux to the electrodes (Fig. 4) and the ion density profile (not shown) are strongly time modulated both in the 100 and 75 m plasmas.…”

mentioning

confidence: 70%

“…In conventional low-pressure rf discharges, both the and modes are observed and an increase in the bulk plasma density accompanies the transition from the to the mode. This increase is due to the nonlocal spreading of the ionization caused by electrons [8,21]. For the smallest microplasmas discussed in this Letter, however, the mode could not be sustained and high-energy electrons can be considered to be in local equilibrium ( " 7 m L).…”

mentioning

confidence: 89%

Electron Kinetics in Radio-Frequency Atmospheric-Pressure Microplasmas

2007

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The kinetic study of three radio-frequency atmospheric-pressure helium microdischarges indicates that the electron energy probability function is far from equilibrium, and three electron groups with three distinct temperatures are identified. The relative population of electrons in different energy regions is strongly time modulated and differs significantly from values recently reported from fluid analyses. It is also shown that a flux of energetic electrons (" > 5 eV) that comprises up to 50% of the total electron flux can reach the electrodes. This energetic electron flux provides a new means of delivering energy to the electrodes and tuning the surface chemistry in atmospheric-pressure discharges. The three electron groups and the engineering of an energetic electron flux might open up a new paradigm in plasma-surface chemistry that has not been considered up until now.

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“…The "nonlocal" approach is the opposite case to the "local" description of a plasma, where f 0 (r, v) can be assumed to be a function of only the kinetic energy and the local rf electric field f 0 [mv 2 /2, E(r)] whereas gradients of the local rf electric field and the influence of the ambipolar electric field are neglected. The nonlocal approach has been successfully applied to the self-consistent kinetic modelling of various low-pressure discharges: the capacitively coupled plasmas [28][29][30][31], the inductively coupled plasmas [32][33][34][35], the dc discharges [36,37], the afterglow [38], and the surface-wave discharges [39]. Additional references can be found in reviews [40][41][42].…”

Section: Self-consistent System Of Equations For a Kinetic Descrimentioning

confidence: 99%

Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating

Kaganovich¹,

Polomarov²,

Theodosiou³

2004

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In low-pressure discharges, where the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the non-Maxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equations for the kinetic description of nonlocal, nonuniform, nearly collisionless plasmas of low-pressure discharges is reported. It consists of the nonlocal conductivity operator and the averaged kinetic equation for calculation of the non-Maxwellian EEDF. This system was applied to the calculation of collisionless heating in capacitively and inductively coupled plasmas. In particular, the importance of accounting for the nonuniform plasma density profile for computing the current density profile and the EEDF is demonstrated. The enhancement of collisionless heating due to the bounce resonance between the electron motion in the potential well and the external rf electric field is investigated. It is shown that a nonlinear and self-consistent treatment is necessary for the correct description of collisionless heating.

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Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures

Abstract: Abstract-Index Terms-Nonlocal ionization by secondary electrons, radio frequency capacitively coupled discharge.

Cited by 10 publications

References 12 publications

Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Electron Kinetics in Radio-Frequency Atmospheric-Pressure Microplasmas

Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating

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