The Shu'ubiyya in Al-Andalus: The Risala of Ibn Garcia and Five Refutations

Sturcken, H. Tracy; Monroe, James T.

doi:10.2307/338333

Cited by 2 publications

(2 citation statements)

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“…After top yoke fabrication and encapsulation by a bilayer of SiN x and TEOS, electrical contacts (Cu pads) were exposed using RIE. In some cases, an electroplated Ni + Au bilayer was then applied to C4 and wirebonding pads, for example in the case of those inductors which were evaluated by Columbia University after packaging them in conjunction with their 45-nm technology node test processor using a 2.5D chip stacking process (9). SEM cross-section images of two-turn inductors and the magnetic via region are displayed in Fig.…”

Section: Inductor Fabricationmentioning

confidence: 99%

(Invited) Developments in Integrated On-Chip Inductors with Magnetic Yokes

O’Sullivan¹,

Wang²,

Herget³

et al. 2013

ECS Trans.

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Thin-film ferromagnetic inductors show great potential as the energy storage element for integrated circuits containing on-chip power management. In order to achieve the high energy storage required for power management, on-chip inductors require relatively thick magnetic yoke materials (≥ a micron). The first part of this paper includes a review of on-chip inductors with magnetic materials from earlier studies. The second part describes the fabrication and characterization of a magnetic inductor on a silicon interposer at IBM. These inductors contained a variety of yoke geometries, included single-turn and multi-turn coils, and were fabricated on 200mm silicon wafers in a CMOS back-end-ofline (BEOL) facility. Each inductor consisted of electroplated copper coils enclosed by electroplated Ni 45 Fe 55 yokes. Aspects of the fabrication of the inductors are described, along with the magnetic properties of the electroplated yoke material and inductor performance.

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Section: Inductor Fabricationmentioning

confidence: 99%

(Invited) Developments in Integrated On-Chip Inductors with Magnetic Yokes

O’Sullivan¹,

Wang²,

Herget³

et al. 2013

ECS Trans.

View full text Add to dashboard Cite

show abstract

“…2; the coil was encapsulated with hard-baked resist dielectric, which allowed the top yoke to slope down towards the magnetic via region for improved magnetic performance. Magnetic properties of the electroplated yoke material will be described (including high frequency permeability measurements), along with the performance of various fabricated inductors [4,5].…”

mentioning

confidence: 99%