“…The development of the structure in polycrystalline thin films is a very complex process and displays different features in different stages of film growth [15]. Considering the structure development of real polycrystalline thin films; the effects of the deposition parameters on the structure and the appearance of particular structural features, it can be concluded that a comprehensive description of the formation of these particular structural features is possible by following the basic structure-forming phenomena well known in materials science and solid-state physics (nucleation, crystal growth, grain growth) [13,14,15,30,31,32,33,34]. These processes are composed of elementary atomic processes, and can account for the global effects on the structure evolution [15].…”