2020
DOI: 10.1007/s10854-020-04714-8
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The role of substrate temperature on the performance of humidity sensors manufactured from cerium oxide thin films

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Cited by 7 publications
(3 citation statements)
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“…Therefore, the reports on better sensing performance of nanostructured ceria compared to the bulk material come as no surprise [ 8 , 9 ]. For the preparation of ceria thin-films, a variety of physical deposition methods has been reported [ 9 , 10 ]. Several reports of relatively demanding methods, such as pulsed laser deposition or magnetron sputtering, stand out [ 10 ].…”
Section: Introductionmentioning
confidence: 99%
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“…Therefore, the reports on better sensing performance of nanostructured ceria compared to the bulk material come as no surprise [ 8 , 9 ]. For the preparation of ceria thin-films, a variety of physical deposition methods has been reported [ 9 , 10 ]. Several reports of relatively demanding methods, such as pulsed laser deposition or magnetron sputtering, stand out [ 10 ].…”
Section: Introductionmentioning
confidence: 99%
“…For the preparation of ceria thin-films, a variety of physical deposition methods has been reported [ 9 , 10 ]. Several reports of relatively demanding methods, such as pulsed laser deposition or magnetron sputtering, stand out [ 10 ]. Among demanding chemical depositions, it was shown that chemical vapor deposition can be used [ 11 ].…”
Section: Introductionmentioning
confidence: 99%
“…23 However, the ferroelectric structure has different characteristics at the nano-scale compared to its bulk materials, such as the curie temperature(T c ), mean polarisation, area of the coercive electric field, hysteresis loop, remnant polarisation, and piezoelectric strain, all of which rely on the crystal structure size. 25,26 The most common ferroelectric oxide within the perovskite ABO3 structure is barium strontium titanate (Ba 1-x Sr x TiO 3 ). Ferroelectric materials, such as BaTiO 3 and PbTiO 3 , are generally known to exhibit the size effect, with ferroelectric properties that change depending on the materials' size to exhibit various behaviors.…”
mentioning
confidence: 99%