The role of phase transition by nucleation, condensation, and evaporation for the synthesis of silicon nanoparticles in a microwave plasma reactor — Simulation and experiment

Silicon quantum dots: surface matter, what next?

“…There are many methods have been developed to produce hydrogen-terminated SiQDs. It is worth to mentions: silane gas plasma synthesis (SiH 4 ), 22,23,25,88,89 electrochemical etching, [90][91][92] halosilane reduction reaction, 93,94 oxide-rich silicon thermal synthesis, [53][54][55] hydrogen silsesquioxane thermal synthesis, 4,6,11,17,[29][30][31][32][33][34][35][36][37][39][40][41][42][43][44][45][46][47][48][49][50][51][52]95 tetraethoxysilane (TES) thermal synthesis, 96,97 pulsed laser ablation, and recently also the green synthesis of rice husk thermal pyrolysis. 85 In general, the photoluminescence of the resulting material depends on the type of synthesis carried out.…”

Recent Advances in the Plasma-Assisted Synthesis of Silicon-Based Thin Films and Nanostructures

“…The remote configuration is suitable for avoiding som effects such as ion bombardment on the growing film as well as excessive fragmentatio of precursor molecules but increases the complexity of the reactor. Microwave discharges were also investigated for the synthesis of nanostructures Wollny and coworkers [56] employed a microwave-assisted PECVD reactor for th growth of silicon nanoparticles using a mixture of Ar, H2, and SiH4, directly injected int the plasma zone at a reduced pressure of 10 kPa. The silane precursor was dissociated i the plasma, giving rise to the production, by means of gas-phase nucleation, o nanoparticles that were transported by the plasma stream.…”

Spectroscopic Properties of Semiconductor Nanoparticles near the Solid-to-Liquid Phase Transition

“…In the case of microwave plasma synthesis, the particles are present as isolated spheres with varying particle diameters that can be approximated with a log–normal distribution and a varying particle temperature depending on the location within the nanoparticle stream. Since the nanoparticles are strongly confined to the edge of the emerging nanoparticle stream, the temperature variation across the particle ensemble is small and therefore neglected. The spectral extinction coefficient is then related to the optical properties of the particles by K λ , normale normalx normalt ( s ) = N normall normali normalq ( s ) ∫ 0 ∞ π d normalp 2 4 Q λ , normale normalx normalt , normall normali normalq [ d p , ε l i q false( d normalp , T false) ] p normall normali normalq ( d p , s ) .25em normald d normalp + N normals normalo normall ( s ) ∫ 0 ∞ π d normalp 2 …”

“…In the case of microwave plasma synthesis, the particles are present as isolated spheres with varying particle diameters that can be approximated with a log–normal distribution and a varying particle temperature depending on the location within the nanoparticle stream. Since the nanoparticles are strongly confined to the edge of the emerging nanoparticle stream, the temperature variation across the particle ensemble is small and therefore neglected. The spectral extinction coefficient is then related to the optical properties of the particles by …”