The Recent Progress of MEMS/NEMS Resonators

Abstract

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Analysis of Size-Dependent Linear Static Bending, Buckling, and Free Vibration Based on a Modified Couple Stress Theory

“…Due to their small volume, light weight, low energy consumption, fast response, and excellent performance, MEMS/NEMS devices play an irreplaceable role in some high-precision fields, including electronics, machinery, materials, automatic control, physics, chemistry, biology, and other disciplines. This technology has shown a very wide range of applications in consumer electronics, industrial control, medical science and technology, communication, national defense, and other aspects [ 1 , 2 , 3 ]. The manufacturing sensitivity and reliability issues of multi-field and multi-scale coupling are challenges for these devices [ 4 , 5 , 6 , 7 ].…”

Review of the VO2 smart material applications with emphasis on its use for spacecraft thermal control

“…It is considered one of the important transition metal oxides that have unique properties and physical phenomena in a strongly correlated transition, the MIT being one class of this transition. It is considered for transistors with steep slope voltage requiring a small amount of energy with a very fast transition, as well as optical switches for telecom or smart thermal radiators One can find reviews of the general applications (Liu et al, 2018), or regarding specific application such as VO 2 on flexible substrate (Chang et al, 2021), nanodevices (Zhang et al, 2021), MEMS THz meta-surface (Prakash et al, 2021), or NEMs/MEMS resonators (Wei et al, 2021), Sections 4-7 are dedicated to our approach to spacecraft thermal control based on a VO 2 passive thin-film as a smart radiator thermal device (SRD) that employs a variable heat-transfer/emitter structure. Section 4 presents the principle of using the VO 2 as Smart Thermal radiator Device.…”

A Cascaded MEMS Amplitude Demodulator for Large Dynamic Range Application in RF Receiver

“…Researchers have focused on the improvement of MEMS electrostatic [4][5][6][7][8] or thermal [9][10][11][12] mixer-filters to replace the traditional mixer and low-pass filter (LPF) in RF receivers. To acquire a higher quality of factor and sensitivity, they attempt different approaches, including mechanism analysis, structure optimization, and process/material improvement [13][14][15][16][17][18]. The use of those MEMS mixer-filters can not only replace separate components to reduce the size of communication devices, but also serve as a passive device with low power consumption.…”

“…The use of those MEMS mixer-filters can not only replace separate components to reduce the size of communication devices, but also serve as a passive device with low power consumption. Despite these successes, the engineering work still needs to be addressed [18,19]. Firstly, the carrier frequencies of these devices are generally less than the GHz range, as their characteristic impedances are larger than 50 ohms.…”