“…Due to their small volume, light weight, low energy consumption, fast response, and excellent performance, MEMS/NEMS devices play an irreplaceable role in some high-precision fields, including electronics, machinery, materials, automatic control, physics, chemistry, biology, and other disciplines. This technology has shown a very wide range of applications in consumer electronics, industrial control, medical science and technology, communication, national defense, and other aspects [ 1 , 2 , 3 ]. The manufacturing sensitivity and reliability issues of multi-field and multi-scale coupling are challenges for these devices [ 4 , 5 , 6 , 7 ].…”