The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

Abstract

We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (2~n~n ~ 1 x 10 -4) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 gm made in SisN4. This layer has a thickness of I00 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments. © 1997 Elsevier Science S.A.

Free-Solution, Label-Free Molecular Interactions Studied by Back-Scattering Interferometry

“…Examples include on-chip embodiments of a Mach-Zehnder (11)(12)(13)(14) and Young Interferometer (15), dual polarization interferometer (16), porous Si (17) and nanoporous Al (18) sensors, diffraction optics technology (19), and the biological compact disk (BioCD) (20,21), as well as BSI (9,10,22). The Mach-Zehnder and Young dual polarization interferometers use wave guiding to monitor binding with surface interaction sensing, which requires relatively long sections of the channel to be coated with the target and large sample volumes to be introduced to facilitate micromolar to nanomolar detection limits.…”

Buried anti resonant reflecting optical waveguide based on porous silicon material for an integrated Mach Zehnder structure

“…The Mach Zehnder (MZ) configuration appears to be the most widely used device in the field of biosensors thanks to its easy design and fabrication. 5 Recently, MZ interferometers using various materials for chemical or biochemical sensing applications have been developed. [6][7][8][9] In these MZ structures, the molecules to be detected are adsorbed at the surface of the interaction zone of the sensing arm and so will interact only with the evanescent field.…”

Polymer Waveguide Based Refractive Index Sensor Using Polarimetric Interference

“…능을 갖고 있고 소형화가 가능하다는 장점을 가지고 있으며 , , 표면 플라즈몬 공명 센서 (surface plasmon resonance) [1] 브래 , 그격자 센서 (bragg grating) , [2] 마흐젠더 간섭계(Mach-Zehnder 센서 interferometer) [3] 등이 그 주를 이루고 있다 이들 중에서 . 편광 간섭 을 이용한 센서는 광섬유 (polarimetric interference) , 광도파로 형태로 구성되어 있다.…”