The pyrolysis temperature of triethylgallium in the presence of arsine of trimethylaluminum

Mashita, Masao; Horiguchi, Seishi; Shimazu, M.; Kamon, K.; Mihara, Morihiro; Ishii, Makoto

doi:10.1016/0022-0248(86)90301-5

Cited by 50 publications

(11 citation statements)

References 11 publications

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“…And this model is supported by the production distributions of C 2 H 4 , C 2 H 5 d ; C 2 H 6 , C 4 H 10 with different pyrolysis temperature [14,15]. According to the above reaction scheme we propose a possible mechanism.…”

Section: Dependence Of Lattice Mismatch On the H 2 Flow Rate Through mentioning

confidence: 77%

Growth of heavily Zn-doped InGaAs at low temperature by LP-MOCVD

Lin

Jiang

Wei

et al. 2004

Journal of Crystal Growth

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Section: Dependence Of Lattice Mismatch On the H 2 Flow Rate Through mentioning

confidence: 77%

Growth of heavily Zn-doped InGaAs at low temperature by LP-MOCVD

Lin

Jiang

Wei

et al. 2004

Journal of Crystal Growth

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“…For most studies linear quadrupole mass spectrometers (QMS) were used. Hence, at least two expensive pressure reduction stages were necessary to reduce the pressure from MOVPE conditions (mbar range) down to 1E-5 mbar needed for QMS operation 9 . Furthermore, the pressure reduction can lead to changes in the gas phase so that in-situ measurements become even more challenging 6 .…”

Section: Introductionmentioning

confidence: 99%

An experimental approach for real time mass spectrometric CVD gas phase investigations

Nattermann

Maßmeyer

Derpmann

et al. 2018

Sci Rep

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This is a report on the first setup of a recently developed, extremely sensitive and very fast 3D quadrupole ion trap mass spectrometer inline in a metalorganic vapour phase epitaxy (MOVPE) system. This setup was developed ultimately for the decomposition- and the interaction analysis of various established as well as novel metalorganic sources for MOVPE deposition of III/V semiconductors. To make in-situ gas phase and growth interaction analysis on a new level of sensitivity possible without disturbing the MOVPE growth process itself, an optimized experimental connection of the mass spectrometer to the MOVPE system is required. This work reports on the realization of such an experimental setup and provides first proof of concept for decomposition analysis. In addition, a comparison to previous studies and gas-phase analysis at MOVPE systems will be given in this work.

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“…At lower temperatures (such as the growth temperature of 550 C as we used), TEGa mainly pyrolyses by losing ethyl radicals [7]. AsH 3 was supposed to react with ethyl radicals [8]:…”

Section: Effect Of V/iii Ratio On Lattice Mismatch Of Ingaas To Inpmentioning

confidence: 99%