The PTB high-accuracy spectral responsivity scale in the ultraviolet

Richter, M.; Johannsen, Uwe; Kuschnerus, Peter; Kroth, U.; Rabus, Hans; Ulm, G.; Werner, Lutz

doi:10.1088/0026-1394/37/5/37

Cited by 16 publications

(10 citation statements)

References 19 publications

(24 reference statements)

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“…Laserbased calibrations in the UV are only available at a few laser lines and their uncertainty is about an order of magnitude larger than the uncertainty of calibrations in the visible. Nevertheless, this is sufficient to establish an UV responsivity scale with reduced uncertainty [5].…”

Section: Introductionmentioning

confidence: 99%

Accurate determination of the spectral responsivity of silicon trap detectors between 238 nm and 1015 nm using a laser-based cryogenic radiometer

et al. 2000

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The Physikalisch-Technische Bundesanstalt has further improved and extended its spectral responsivity scale based on the laser-operated radiation thermometry cryogenic radiometer. Five laser wavelengths in the ultraviolet (UV) (238 nm to 400 nm) and another fifteen in the visible and near-infrared (NIR) (400 nm to 1015 nm) almost cover the entire spectral range where silicon photodiodes can be used in air. The lasers employed are a Kr+ laser, an Ar+ laser with optional intra-cavity frequency-doubling, and a continuously tuneable Ti:sapphire ring laser. The total relative standard uncertainty of the spectral responsivity at the laser lines is u = 10-4 in the visible and NIR below 950 nm and u = 10-3 in the UV. With an improved model for interpolation between the laser wavelengths, a continuous scale of spectral responsivity has been established in the wavelength range 400 nm to 1015 nm.

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Section: Introductionmentioning

confidence: 99%

Accurate determination of the spectral responsivity of silicon trap detectors between 238 nm and 1015 nm using a laser-based cryogenic radiometer

et al. 2000

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“…Figure 5 shows the responsivity of several photodiodes calibrated as transfer detector standards for the dissemination of the radiometric scale from the UV up to the X-ray region. The relative uncertainty is below 0.5 percent in the greatest part of the spectral range [11,30].…”

Section: Calibrations Based On a Primary Detector Standardmentioning

confidence: 89%

Radiometry with synchrotron radiation at the PTB laboratory at Bessy ii

Klein

Krumrey

Richter

et al. 2002

Synchrotron Radiation News

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“…The monochromatized SR used for detector calibration must be of high spectral purity, because higher-order contributions and stray light contribute to the uncertainty of measurement for the spectral responsivity of the transfer detector standards. The relative standard uncertainty of the spectral responsivity scale disseminated by PTB based on cryogenic ESRs and monochromatized SR in a broad spectral range from the UV to the x-ray range (10 keV) is dependent on photon energy with typical values of 0.5% in the soft x-ray and x-ray region [54][55][56]61]. In the extreme UV region at a wavelength of about 13 nm, which is of special importance for the next-generation lithography (see section 4), photodiodes are calibrated with a relative uncertainty of 0.26% [55].…”

Section: Calibration Of Transfer Detector Standardsmentioning

confidence: 99%

Radiometry with synchrotron radiation

Ulm¹

2003

Metrologia

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Electron storage rings are nearly ideal radiation sources for radiometry over a broad spectral range from the infrared to the x-ray region. Many national metrology institutes make extensive use of synchrotron radiation for radiometry. The Synchrotron Ultraviolet Radiation Facility SURF III, which has recently been upgraded, is used by the National Institute of Standards and Technology (NIST), and the Physikalisch-Technische Bundesanstalt (PTB) operates a European radiometry laboratory at the third-generation storage ring BESSY II. The storage rings are used as calculable broadband radiation sources (primary source standards) and in combination with primary detector standards as sources of continuously tunable monochromatic radiation for detector calibration. The use of cryogenic electrical-substitution radiometers as primary detector standards has made it possible to considerably extend high-accuracy calibrations from the ultraviolet (UV) to the x-ray regime. Radiometry in the extreme UV (EUV) range, and in particular reflectometry, has become increasingly important for the development of EUV lithography. An overview of synchrotron radiation based radiometry will be given.

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The PTB high-accuracy spectral responsivity scale in the ultraviolet

Cited by 16 publications

References 19 publications

Accurate determination of the spectral responsivity of silicon trap detectors between 238 nm and 1015 nm using a laser-based cryogenic radiometer

Accurate determination of the spectral responsivity of silicon trap detectors between 238 nm and 1015 nm using a laser-based cryogenic radiometer

Radiometry with synchrotron radiation at the PTB laboratory at Bessy ii

Radiometry with synchrotron radiation

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