1993
DOI: 10.1016/0168-583x(93)90803-e
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The properties of titanium nitride prepared by dynamic ion mixing

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Cited by 9 publications
(2 citation statements)
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“…While conventional chemical vapour deposition, sputtering deposition, ion plating and ion implantation processes have made important contributions to improving corrosion and wear resistance, each of these procedures is inherently limited in its surface modification capabilities. The IBAD method, however, is extremely reliable because of the high degree of in situ control associated with ion energy, deposition rate, thickness and composition, and achieves excellent adhesion to metal surfaces without requiring excessively high temperature (2, 3). Our previous study suggested that VHN value with a load of 3 g for 5 s reaches a plateau when TiN film thickness is 2 μ m or more (5).…”
Section: Discussionmentioning
confidence: 99%
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“…While conventional chemical vapour deposition, sputtering deposition, ion plating and ion implantation processes have made important contributions to improving corrosion and wear resistance, each of these procedures is inherently limited in its surface modification capabilities. The IBAD method, however, is extremely reliable because of the high degree of in situ control associated with ion energy, deposition rate, thickness and composition, and achieves excellent adhesion to metal surfaces without requiring excessively high temperature (2, 3). Our previous study suggested that VHN value with a load of 3 g for 5 s reaches a plateau when TiN film thickness is 2 μ m or more (5).…”
Section: Discussionmentioning
confidence: 99%
“…Titanium nitride (TiN) is commonly used as a coating material, to achieve these desired properties. Ion‐beam‐assisted deposition (IBAD) has received considerable attention as a coating method, because of its flexible control of the structural and chemical properties of the resulting films (2–4). Films generated by IBAD have the advantage of improved adhesion to the substrate and exhibit excellent corrosion resistance compared with coatings deposited without ion bombardment.…”
Section: Introductionmentioning
confidence: 99%