The Properties of Cd1−xZnxTe Films Prepared by RF Magnetron Sputtering

Wang, Tongying; Huang, Jian; Chen, Zhuorui; Huang, Haofei; Li, Hongwei; Tang, Ke; Cao, Meng; Wang, Linjun

doi:10.1007/s11664-020-08266-9

Cited by 4 publications

(1 citation statement)

References 28 publications

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“…CZT film photodetectors with low cost and large area have garnered significant interest. Recently, several methods for growing CZT film materials have been developed, such as electrochemical growth [7], molecular beam epitaxy [8], thermal evaporation [9], radio frequency (RF) magnetron sputtering [10,11], and close-spaced sublimation (CSS) [12]. Among those, the RF magnetron sputtering method stands out due to its excellent uniformity and easy control, allowing for the deposition of large size CZT films with uniform surfaces and relatively high resistivity [13].…”

Section: Introductionmentioning

confidence: 99%

Performance of ultraviolet photodetectors based on sputtered CdZnTe films

Li,

Huang,

Lina

et al. 2024

Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023)

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High-quality CdZnTe (CZT) films were fabricated using the radio frequency magnetron sputtering technique. Ultraviolet (UV) photodetectors based on CZT films were fabricated with gallium-doped zinc oxide (GZO) and gold electrodes. The electrodes and film thickness on the performance of CZT film UV photodetectors was studied. The results indicate that GZO electrodes can form good ohmic contact with CZT, thereby enhancing the sensitivity and response of CZT photodetectors. An increase in film thickness improves the film quality, resulting in enhanced performance of CZT film UV photodetectors.

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