“…Smaller structures such as nanorods or nanopillars can be obtained through the metal-assisted chemical etching [35] or dry etching method [36][37][38] has several advantages, such as low cost and mass productive, and it has been extensively used. Some nanoparticles, such as silver [36], silicon carbide [37], silicon oxide [38], and cesium chloride (CsCl) [32,39,40], can collocate with dry etching as masks to fabricate nanopillars. Among the above nanoparticles, CsCl is an inorganic salt which has very strong water absorptivity, and CsCl thin film can form hemispheres in a humidity environment.…”