The normal cold–cathode glow discharge

Emeléus, K. G.

doi:10.1080/00207217408900370

Cited by 11 publications

(2 citation statements)

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“…The solid material is connected to the cathode of a cold cathode glow discharge. 3 The glow discharge sustains gaseous plasma, consisting of free electrons and positively charged ions. The positively charged ions enter the potential drop (cathode sheath) next to the cathode and are accelerated toward the cathode.…”

Section: Glow Discharge Optical Emission Spectroscopymentioning

confidence: 99%

Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

Vesel

Zaplotnik

Primc

et al. 2023

Journal of Vacuum Science &Amp; Technology A

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Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure of samples to energetic positively charged ions from gaseous plasma, providing specifics of both surface- and gas-phase collision phenomena that are considered. The early stages of developing GDOES useful for the determination of surface composition and depth profiling of solid materials are reviewed and analyzed, stressing the contribution of early authors. The advantages as well as drawbacks of the GDOES technique are presented and discussed. The recent applications of this technique for depth profiling of various materials are presented, and the directions for constructing a laboratory-scale device are provided.

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Section: Glow Discharge Optical Emission Spectroscopymentioning

confidence: 99%

Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

Vesel

Zaplotnik

Primc

et al. 2023

Journal of Vacuum Science &Amp; Technology A

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“…The intensity I of each spectrum feature passes through a maximum in the x direction perpendicular to C. Even disregarding optical structure close to C (due in large part to positive rays and not of immediate interest) the Zversusx curves have a variety of shapes; some are shown in figure 1 for a discharge in hydrogen and mercury vapour (Seeliger 1934). As a result the boundary between the NG and CFS (Glimmsaum, GS), which is a modified Langmuir-Bohm plasma to space-charge transition zone (Emeleus 1974) is also optically diffuse and exhibits chromatic dispersion in x . The apparent edge of the NG (cf.…”

Section: Introductionmentioning

confidence: 99%

Chromatic dispersion in the negative glow-cathode fall space transition zone

Emeléus

Coulter

1984

J. Phys. D: Appl. Phys.

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It has been shown that the chromatic dispersion in the boundary zone between the negative glow and cathode fall space of a cold cathode discharge is in many instances correctly predicted qualitatively by the rules that the maximum of intensity of a spectral feature is the nearer the negative glow the lower its excitation potential, and that the width of the intensity versus position curve increases with the excitation potential. The effective excitation potential is however not necessarily the least potential for which the spectrum can be excited by electron impact, but may be a higher one which allows for the excitation cross-section being comparable at higher voltages with its value near threshold. Spectra with excitation potentials approaching the cathode fall must be excluded from the rules because they can only appear relatively close to the negative glow. When more information is required than is furnished by the rules, and it is impracticable to obtain this accurately using a Boltzmann transport theorem, Monte Carlo or equivalent analysis of the discharge, it can sometimes be obtained semi-quantitatively from a simpler approximate model of the fall space. In some discharges allowance may have to be made for changes in number density of the atoms or molecules due to heating of the gas and electrodes, and for the effects of metastable atoms and molecules and resonance radiation.

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